Holographic femtosecond laser processing by use of a liquid crystal spatial light modulator

被引：0
作者：
Hayasaki, Yoshio [1 ]
机构：
[1] Univ Tokushima, Fac Engn, Dept Opt Sci & Technol, Tokushima 7708506, Japan
来源：
HOLOGRAPHY AND DIFFRACTIVE OPTICS III | 2008年 / 6832卷
关键词：
femtosecond laser processing; computer-generated hologram; spatial light modulator; nanostructures;
D O I：
10.1117/12.755245
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator is demonstrated. The use of a spatial light modulator enables to perform an arbitrary and variable patterning. This holographic femtosecond laser processing has advantages of high-speed and high light-use efficiency. A critical issue is to precisely control the intensities of the diffraction peaks of the computer-generated hologram. We demonstrated some methods for the control of diffraction peak intensity. We also demonstrate the laser processing with two-dimensional and three-dimensional parallelism using the Fourier hologram.
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页数：8
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