Optical and mechanical properties of amorphous and crystalline yttria-stabilized zirconia thin films prepared by pulsed laser deposition

被引:110
作者
Heiroth, S. [1 ]
Ghisleni, R. [2 ]
Lippert, T. [1 ]
Michler, J. [2 ]
Wokaun, A. [1 ]
机构
[1] Paul Scherrer Inst, Gen Energy Res Dept, CH-5232 Villigen, Switzerland
[2] EMPA Swiss Fed Labs Mat Testing & Res, Lab Mech Mat & Nanostruct, CH-3602 Thun, Switzerland
关键词
Thin films; Yttria-stabilized zirconia; Microstructures; Optical transmission; Nanoindentation; SURFACE-PLASMON RESONANCE; ELECTRON-BEAM EVAPORATION; STRUCTURAL-CHARACTERIZATION; INDENTATION EXPERIMENTS; REFRACTIVE-INDEX; DAMAGE THRESHOLD; VAPOR-DEPOSITION; ZRO2; FILMS; NANOINDENTATION; TEMPERATURE;
D O I
10.1016/j.actamat.2010.12.029
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sub-micron thick yttria-stabilized zirconia (YSZ) layers (t = 400-700 nm) containing 3 (3YSZ) or 8 mol.% (8YSZ) Y2O3 with micro-structures ranging from isotropic amorphous to columnar polycrystalline and a variable porosity can be grown by pulsed laser deposition (PLD) varying the substrate temperature and oxygen background pressure. The dependence of the mechanical and optical properties on the film microstructure and chemical composition was investigated by nanoindentation experiments and transmission spectrophotometry. Dense amorphous YSZ layers exhibit a higher optical transmissivity, 0.2 eV lower band gap energy (5.5 vs. 5.7 eV), and up to 25% lower hardness (11.9 vs. 16.0 GPa) and reduced elastic moduli (231 vs. 278 GPa) compared with crystalline films, irrespective of the dopant level. High refractive indices, n(600) (nm), in the range 2.18-2.23, i.e. close to single crystal reference data, are obtained for the low pressure PLD regime. Within these boundaries the index decreases with increasing Y2O3 content and is consistently slightly smaller for amorphous layers compared with crystalline films of the same composition, due to a lower atomic packing density. The gradual decrease in the refractive index for YSZ layers grown at background pressures above 1.0 Pa marks the development of pores in the form of inter-columnar voids and can be used for sensitive quantification of the film porosity. The lattice order affects the fracture behaviour, as amorphous coatings show plastic deformation mediated by shear bands, while the crystalline layers yield hoop and surface cracks upon indentation. The crystalline 3YSZ films exhibit an enhanced fracture toughness compared with 8YSZ, which is related to the stress-induced transformation to the monoclinic phase in partially stabilized zirconia. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:2330 / 2340
页数:11
相关论文
共 62 条
[1]   Mechanical properties of amorphous anodic alumina and tantala films using nanoindentation [J].
Alcalá, G ;
Skeldon, P ;
Thompson, GE ;
Mann, AB ;
Habazaki, H ;
Shimizu, K .
NANOTECHNOLOGY, 2002, 13 (04) :451-455
[2]   Synthesis, structural characterization and optical properties of multilayered Yttria-stabilized ZrO2 thin films obtained by aerosol assisted chemical vapour deposition [J].
Amezaga-Madrid, P. ;
Antunez-Flores, W. ;
Monarrez-Garcia, I. ;
Gonzalez-Hernandez, J. ;
Martinez-Sanchez, R. ;
Miki-Yoshida, M. .
THIN SOLID FILMS, 2008, 516 (23) :8282-8288
[3]   LOW-LOSS ZRO2 FILMS FOR OPTICAL APPLICATIONS IN THE UV REGION [J].
APPARAO, KVSR ;
SAHOO, NK ;
BAGCHI, TC .
THIN SOLID FILMS, 1985, 129 (3-4) :L71-L73
[4]   Comparison of different high and low index materials in the manufacture of high laser damage threshold mirrors at the 351 nm wavelength [J].
Bazin, N ;
Andrew, JE ;
Mcinnes, HA .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 13 (1-3) :757-761
[5]   Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by rf reactive magnetron sputtering [J].
Boulouz, M ;
Boulouz, A ;
Giani, A ;
Boyer, A .
THIN SOLID FILMS, 1998, 323 (1-2) :85-92
[6]   OPTICAL-PROPERTIES OF CUBIC STABILIZED ZIRCONIA [J].
CAMAGNI, P ;
GALINETTO, P ;
SAMOGGIA, G ;
ZEMA, N .
SOLID STATE COMMUNICATIONS, 1992, 83 (11) :943-947
[7]   Colour centre production in yttria-stabilized zirconia by swift charged particle irradiations [J].
Costantini, JM ;
Beuneu, F ;
Gourier, D ;
Trautmann, C ;
Calas, G ;
Toulemonde, M .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (23) :3957-3971
[8]  
Díaz-Parralejo A, 2004, THIN SOLID FILMS, V458, P92, DOI 10.1016/j.tsf.2003.11.311
[9]   Phosphor thermometry in an electron beam physical vapour deposition produced thermal barrier coating doped with dysprosium [J].
Feist, JP ;
Heyes, AL ;
Nicholls, JR .
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART G-JOURNAL OF AEROSPACE ENGINEERING, 2001, 215 (G6) :333-341
[10]   EXPERIMENTAL AND THEORETICAL DETERMINATION OF THE ELECTRONIC-STRUCTURE AND OPTICAL-PROPERTIES OF 3 PHASES OF ZRO2 [J].
FRENCH, RH ;
GLASS, SJ ;
OHUCHI, FS ;
XU, YN ;
CHING, WY .
PHYSICAL REVIEW B, 1994, 49 (08) :5133-5141