Surface reconstructions of (0001) AlN during metal-organic vapor phase epitaxy

被引：7

作者：

Pristovsek, Markus ^{[1
,2
]}

Bellman, Konrad ^{[1
]}

Mehnke, Frank ^{[1
]}

Stellmach, Joachim ^{[1
]}

Wernicke, Tim ^{[1
]}

Kneissl, Michael ^{[1
]}

机构：

[1] Tech Univ Berlin, Inst Festkorperphys, EW 6-1,Hardenbergstr 36, D-10623 Berlin, Germany

[2] Nagoya Univ, Inst Mat Sci & Sustainabil, Ctr Integrated Res Future Elect, Chikusa Ku, Furo Cho C3-1, Nagoya, Aichi 4648603, Japan

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2017年 / 254卷 / 08期

关键词：

AlN; Ellipsometry; MOVPE; surface reconstruction; surfaces; MOLECULAR-BEAM EPITAXY; SPECTROSCOPIC ELLIPSOMETRY; GROWTH; DEPOSITION; GAN(0001); SAPPHIRE; MOVPE; FLOW;

D O I：

10.1002/pssb.201600711

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We observed (0001) AlN wurzite surfaces by atomic force microscopy after 500nm regrowth in metal-organic vapor phase epitaxy. The steps changed from double to single height with decreasing V/III ratio. The single height step edges were alternating smooth and rough due to the two different step types on (0001) wurzite surfaces. By reducing the V/III ratio, the widths equalize for terraces with smooth and rough edges, until Al terminated steps start to dominate, and thus promote again double height steps. Using in situ ellipsometry at lambda =400nm under static conditions, we could directly identify three different surface reconstructions at high NH3, low NH3, and without NH3 which correlates with the different step terminations. (C) 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页数：5

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