An upgraded ion source for a mass spectrometer

被引:7
作者
Zavilopulo, A. N. [1 ]
Mironets, E. A. [2 ]
Agafonova, A. S. [1 ]
机构
[1] Natl Acad Sci Ukraine, Inst Electron Phys, UA-88017 Uzhgorod, Ukraine
[2] Natl Acad Sci Ukraine, Inst Appl Phys, UA-40030 Uzhgorod, Ukraine
关键词
Mass spectrometers;
D O I
10.1134/S0020441211060315
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A model analysis of ion sources for dynamic mass spectrometers was performed, and the design of an upgraded ion source, which substantially reduces the ion energy spread, allows optimization of the zone of ion extraction from the source, and provides a high sensitivity of the instrument in the operation with low-energy ionizing electrons (down to threshold energies), was developed. Methodological techniques that allow one to analyze and calculate numerical model variants of ion sources of various designs using the SIMION 3D 7.0 program were developed.
引用
收藏
页码:65 / 71
页数:7
相关论文
共 12 条
[1]   Optimizing the energy filter of the "dihedral angle with end-face diaphragms" type [J].
Agafonova, A. S. ;
Surkov, V. A. ;
Fishkova, T. Ya. .
TECHNICAL PHYSICS, 2009, 54 (02) :312-316
[2]  
Agafonova A. S., 2010, SIMION 7 0 VERS 7 SI, Patent No. 58673
[3]  
Agafonova A. S., 2010, Ukr. Patent, Patent No. 58673
[4]  
[Anonymous], 2003, MON MASS SPEKTR MX 7
[5]   Secondary ion mass spectrometer based on a high-dose ion implanter [J].
Baturin, V. A. ;
Eremin, S. A. ;
Pustovoitov, S. A. .
TECHNICAL PHYSICS, 2007, 52 (06) :770-775
[6]  
Baturin V. A., 2006, VOPR ATOM NAUKI FIZI, P222
[7]  
Dawson PH., 1976, QUADRUPOLE MASS SPEC, P95
[8]  
Mallard G., 2000, NIST STANDARD REFERE, V69
[9]  
Slobodenyuk G. I., 1975, KVADRUPOLNYE MASS SP
[10]   THE THRESHOLD LAW FOR SINGLE IONIZATION OF ATOMS OR IONS BY ELECTRONS [J].
WANNIER, GH .
PHYSICAL REVIEW, 1953, 90 (05) :817-825