Fully integrable magnetic field sensor based on delta-E effect

被引：83

作者：

Gojdka, B. ^{[1
]}

Jahns, R. ^{[2
]}

Meurisch, K. ^{[1
]}

Greve, H. ^{[3
]}

Adelung, R. ^{[4
]}

Quandt, E. ^{[3
]}

Knoechel, R. ^{[2
]}

Faupel, F. ^{[1
]}

机构：

[1] Univ Kiel, Fac Engn, Inst Mat Sci Multicomponent Mat, D-24143 Kiel, Germany

[2] Univ Kiel, Fac Engn, Inst Elect & Informat Engn, Microwave Lab, D-24143 Kiel, Germany

[3] Univ Kiel, Fac Engn, Inst Mat Sci Inorgan Funct Mat, D-24143 Kiel, Germany

[4] Univ Kiel, Fac Engn, Inst Mat Sci Funct Nanomat, D-24143 Kiel, Germany

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 22期

关键词：

atomic force microscopy; boron alloys; cantilevers; coatings; cobalt alloys; iron alloys; magnetic field measurement; magnetic sensors; micromachining; micromechanical devices; microsensors; silicon alloys; ATOMIC-FORCE MICROSCOPY;

D O I：

10.1063/1.3664135

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A fully integrable magnetic field sensor based on magnetic microelectromechanical systems is presented. The approach yields high application potential since it is compatible with standard micromachining techniques, operates at room-temperature, and provides high bandwidth and vector field capability. The demonstrator presented in this work consists of a tipless commercial atomic force microscope cantilever which is coated with an amorphous thin film layer of (Fe(90)Co(10))(78)Si(12)B(10). Amplitude and frequency of magnetic fields are measured via the modulation of the oscillation of the microcantilever via the delta-E effect of the FeCoSiB coating. (C) 2011 American Institute of Physics. [doi:10.1063/1.3664135]

引用

页数：3

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