Optimal experimental design for nano-particle atom-counting from high-resolution STEM images

被引：35
作者：
De Backer, A. [1 ]
De Wael, A. [1 ]
Gonnissen, J. [1 ]
Van Aert, S. [1 ]
机构：
[1] Univ Antwerp, Electron Microscopy Mat Sci EMAT, B-2020 Antwerp, Belgium
来源：
ULTRAMICROSCOPY | 2015年 / 151卷
关键词：
High-resolution scanning transmission electron microscopy (HR STEM); Electron microscope design and characterisation; Data processing/image processing; Quantitative ADF STEM; TRANSMISSION ELECTRON-MICROSCOPY; MAXIMUM-LIKELIHOOD-ESTIMATION; STRUCTURE PARAMETERS; SCALE; PRECISION; MONOCHROMATOR; TOMOGRAPHY; POSITIONS;
D O I：
10.1016/j.ultramic.2014.10.015
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
In the present paper, the principles of detection theory are used to quantify the probability of error for atom-counting from high resolution scanning transmission electron microscopy (HR STEM) images. Binary and multiple hypothesis testing have been investigated in order to determine the limits to the precision with which the number of atoms in a projected atomic column can be estimated. The probability of error has been calculated when using STEM images, scattering cross-sections or peak intensities as a criterion to count atoms. Based on this analysis, we conclude that scattering cross-sections perform almost equally well as images and perform better than peak intensities. Furthermore, the optimal STEM detector design can be derived for atom-counting using the expression for the probability of error. We show that for very thin objects LAADF is optimal and that for thicker objects the optimal inner detector angle increases. (C) 2014 Elsevier B.V. All rights reserved
引用
收藏
页码：46 / 55
页数：10
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