A review of vibration-based MEMS piezoelectric energy harvesters

被引：412

作者：

Saadon, Salem ^{[1
]}

Sidek, Othman ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Elect & Elect Engn, Collaborat Microelect Design Excellence Ctr CEDEC, Perai 14300, Pulau Pinang, Malaysia

来源：

ENERGY CONVERSION AND MANAGEMENT | 2011年 / 52卷 / 01期

关键词：

PZT; Vibration; Energy harvesting; MEMS; BAND-PASS FILTERS; POWER GENERATOR; PERFORMANCE; FABRICATION;

D O I：

10.1016/j.enconman.2010.07.024

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration-based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：500 / 504

页数：5

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