Functional Micro-Nano Structures for On-Chip Fourier Transform Spectrometers

被引:0
作者
Malak, Maurine [1 ]
Jefimovs, Konstantins [2 ]
Philipoussis, Irene [1 ]
Di Francesco, Joab [1 ]
Guldimann, Benedikt [3 ]
Scharf, Toralf [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Inst Microtech, OPT Lab, Microcity, Rue Maladiere 71B, CH-2000 Neuchatel, Switzerland
[2] Swiss Fed Labs Mat Sci & Technol, Lab Elect Metrol Reliabil EMPA, CH-8600 Dubendorf, Switzerland
[3] European Space Agcy, ESA ESTEC, TEC MMO, NL-2200 AG Noordwijk, Netherlands
来源
2014 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2014年
关键词
Epocore/Epoclad polymer waveguide; Nano-couplers; Nanofield samplers; Nano-antennas; SWIFTS; Fourier Transform Spectrometer;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Perot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.
引用
收藏
页码:240 / 243
页数:4
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