Multilayer diffraction gratings

被引：0

作者：

Kondakov, AS ^{[1
]}

Roshchupkin, DV ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Microelect Technol & Ultrahigh Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia

来源：

CRYSTALLOGRAPHY REPORTS | 2004年 / 49卷

关键词：

D O I：

暂无

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Multilayer diffraction gratings have been fabricated by different methods and their X-ray optical properties have been studied. Along with the data on the gratings prepared by conventional methods based on etching, the results of studying multilayer diffraction gratings fabricated by the lift-off technique are reported. (C) 2004 MAIK "Nauka/Interperiodica".

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页码：S158 / S165

页数：8

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