Towards a microsytem of multiple production of micro-drops manufactured on silicon

被引：0

作者：

Perdigones, Francisco ^{[1
]}

Luque, Antonio ^{[1
]}

Ganan-Calvo, Alfonso M. ^{[1
]}

Esteve, Jaume ^{[2
]}

Monserrat, Josep ^{[2
]}

Quero, Jose M. ^{[1
]}

机构：

[1] Univ Seville, Escuela Super Ingn, Seville, Spain

[2] Ctr Nacl Microelet, Barcelona, Spain

来源：

2007 SPANISH CONFERENCE ON ELECTRON DEVICES, PROCEEDINGS | 2007年

关键词：

fabrication process; flow focusing; MEMS; multiple device; silicon;

D O I：

10.1109/SCED.2007.384034

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the development of a microsystem of multiple production of micro-drops manufactured on silicon is reported. The technology used to generate the micro-drops is flow focusing. Therefore, the aim is the integration of flow focusing technology on silicon for mass production of microparticles, in this case, micro-drops. All the alternative fabrication processes on silicon, with their advantages and disadvantages not only about fabrication, but also flow focusing operation, are explained. The behaviors of the device obtained by simulations are displayed. The results of simulations show stable and unstable behaviors. The instabilities are due to fluidic interactions. From these simulation some solutions are proposed in order to solve the instability, and therefore, to improve the range of operation of the device.

引用

页码：230 / +

页数：2

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