Mg-C films deposited by radio-frequency sputtering

被引：8
作者：
Kondoh, K.
Serikawa, T.
Kawabata, K.
Yamaguchi, T.
机构：
[1] Osaka Univ, Joining & Welding Res Inst, Ibaraki, Osaka 5670047, Japan
[2] Gifu Prefectural Sci & Technol Promot Ctr, Gifu 5090108, Japan
来源：
SCRIPTA MATERIALIA | 2007年 / 57卷 / 06期
关键词：
Mg-C film; carbon doping; sputtering; amorphous; optically transparent;
D O I：
10.1016/j.scriptamat.2007.05.033
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Novel carbon-doped magnesium (Mg-C) films were prepared by radio-frequency magnetron sputtering on a glass substrate using elementally composed targets of carbon and magnesium plates, and the film properties were examined. Mg-C films with various compositions were successfully deposited at low substrate temperature by controlling the area ratio of the carbon and magnesium plates. The structural and optical properties of the films were greatly modified by carbon doping, resulting in an amorphous optically transparent film. (c) 2007 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：489 / 491
页数：3
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