Synthesis, AACVD and X-ray crystallographic structures of group 13 monoalkoxometallanes

被引：20

作者：

Knapp, Caroline E. ^{[1
]}

Pemberton, Leah ^{[1
]}

Carmalt, Claire J. ^{[1
]}

Pugh, David ^{[1
]}

McMillan, Paul F. ^{[1
]}

Barnett, Sarah A. ^{[1
]}

Tocher, Derek A. ^{[1
]}

机构：

[1] UCL, Dept Chem, London, England

来源：

MAIN GROUP CHEMISTRY | 2010年 / 9卷 / 1-2期

基金：

英国工程与自然科学研究理事会;

关键词：

Gallium alkoxide; indium alkoxide; synthesis; CVD; CHEMICAL-VAPOR-DEPOSITION; FLUORINATED AMINOALKOXIDE; ALKOXIDE COMPLEXES; THIN-FILMS; GALLIUM; PRECURSORS; SESQUIALKOXIDES; ORGANOGALLIUM; ALUMINUM;

D O I：

10.3233/MGC-2010-0002

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The group 13 monoalkoxometallanes [Me2Ga(OC(CH3)(2)CH2OMe)](2) (1) and [Me2In(OCH(CH3)CH2OMe)](2) (2), incorporating donor functionalised alkoxides, were synthesised from the reaction of GaMe3 or InMe3 with ROH (R = C(CH3)(2)CH2OMe (1); R = CH(CH3)CH2OMe (2)) in toluene. X-ray crystallography showed that both compounds adopt dimeric structures with a planar M2O2 ring, and each group 13 atom is coordinated in a distorted trigonal bipyramidal geometry. The AACVD reaction of GaMe3 and ROH (R = C(CH3)(2)CH2OMe, CH2CH2OMe, CH2CH2NMe2) resulted in the formation of thin films of Ga2O3 on glass substrates at 450 degrees C. The gallium oxide films were analyzed by scanning electron microscopy, X-ray powder diffraction, energy dispersive analysis of X-rays, wavelength dispersive analysis of X-rays and X-ray photoelectron spectroscopy. This CVD technique offers a rapid, convenient route to Ga2O3, which involves the in situ formation of dimethylgallium alkoxides, of the type [Me2Ga(mu-OR)](2) similar to compound 1.

引用

页码：31 / 40

页数：10

共 27 条

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[Anonymous], 2015, Acta Crystallogr., V71, P3

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