Transmission electron microscopy observation of thin foil specimens prepared by means of a focused ion beam

被引：29
|
作者：
Saka, H [1 ]
机构：
[1] Nagoya Univ, Dept Quantum Engn, Nagoya, Aichi 4648603, Japan
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 04期
关键词：
D O I：
10.1116/1.590202
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent development in the application of a focused ion beam to preparation of thin foil specimens for transmission electron microscopy observation has been reviewed. It has been shown that this technique is very powerful for characterization of a variety of industrial materials. (C) 1998 American Vacuum Society.
引用
收藏
页码：2522 / 2527
页数：6
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