Computational fluid dynamics performance estimation of turbo booster vacuum pump

被引:11
作者
Cheng, HP
Chen, CJ
Cheng, PW
机构
[1] Natl Taipei Univ Technol, Dept Air Conditioning & Refrigerat Engn, Taipei 106, Taiwan
[2] Natl Sci Council, Precis Instrument Dev Ctr, Hsinchu 300, Taiwan
来源
JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME | 2003年 / 125卷 / 03期
关键词
D O I
10.1115/1.1566042
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
The CFD performance estimation of a turbo booster vacuum pump shows the axial vortex and back flow is evident when the mass flow rate is increased. The pressure is increased from the pump inlet to the outlet for the low mass flow rate cases. But for high mass flow rate cases, the pressure is increased until the region near the end of the rotor is then decreased. The calculated inlet pressure, compression ratio, and pumping Speed is increased, decreased, and decreased, respectively, when the mass flow rate is increased. The pumping speed is increased when the rotor speed is increased.
引用
收藏
页码:586 / 589
页数:4
相关论文
共 7 条
[1]  
HOLWECK F, 1923, CR HEBD ACAD SCI, V43, P177
[2]   Improvement of turbomolecular pumps for ultraclean, low-pressure, and high-gas-flow processing [J].
Ino, K ;
Sekine, K ;
Shibata, T ;
Ohmi, T ;
Maejima, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (04) :2703-2710
[3]   COMBINATION OF TURBOMOLECULAR PUMPING STAGES AND MOLECULAR DRAG STAGES [J].
LEVI, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :2619-2622
[4]   3-DIMENSIONAL LOW-DENSITY FLOWS IN THE SPIRAL GROOVES OF A TURBOMOLECULAR PUMP [J].
NANBU, K ;
IGARASHI, S .
COMPUTERS & FLUIDS, 1992, 21 (02) :221-228
[5]   SPIRAL GROOVED VACUUM PUMP WORKING IN HIGH-PRESSURE RANGES [J].
SAWADA, T ;
NAKAMURA, M ;
ABUMIYA, A .
VACUUM, 1992, 43 (11) :1097-1099
[6]   Turbomolecular pump design for high pressure operation [J].
Spagnol, M ;
Cerruti, R ;
Helmer, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03) :1151-1156
[7]  
*UNIC, 1995, UNIC GEN PURP CFD DE