Inkjet printing and low power laser annealing of silver nanoparticle traces for the realization of low resistivity lines for flexible electronics

被引：102

作者：

Chiolerio, A. ^{[1
]}

Maccioni, G. ^{[1
,2
]}

Martino, P. ^{[3
]}

Cotto, M. ^{[3
]}

Pandolfi, P. ^{[3
]}

Rivolo, P. ^{[4
]}

Ferrero, S. ^{[2
,4
]}

Scaltrito, L. ^{[2
,4
]}

机构：

[1] Politecn Torino, Dept Phys, IT-10129 Turin, Italy

[2] Microla Optoelect, IT-10034 Chivasso, Italy

[3] Politron Inkjet Printing Srl, IT-10129 Turin, Italy

[4] Politecn Torino, Dept Mat Sci & Chem Engn, IT-10129 Turin, Italy

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 08期

关键词：

Flexible electronics; Inkjet printing; Laser annealing; Thin films; ELECTRICAL-PROPERTIES; AG FILMS; TEMPERATURE;

D O I：

10.1016/j.mee.2010.12.099

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the realization of low resistance silver lines by inkjet printing of a commercial silver-based ink on a flexible kapton substrate and subsequent low energy laser annealing to promote nanoparticle coalescence. Our approach resulted in low resistivity values, yet using a low-silver product, around 22 wt.%. Traditional hot-plate annealing processes were compared also. The approach is of particular interest for the realization of electronic parts such as passive and chipless radio frequency identification tags with fully inkjet printed inductors and capacitors - that we also demonstrated. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2481 / 2483

页数：3

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