Fabrication of freestanding SWCNT networks for fast microbolometric focal plane array sensor

被引：4

作者：

Cech, Jiri ^{[1
]}

Swaminathan, V. ^{[2
]}

Wijewarnasuriya, P. ^{[3
]}

Currano, Luke J. ^{[3
]}

Kovalskiy, Andriy ^{[1
]}

Jain, H. ^{[1
]}

机构：

[1] Lehigh Univ, Dept Mat Sci & Engn, Bethlehem, PA 18015 USA

[2] US Army, Acoust & Networked Sensors Div, RDECOM ARDEC, Picatinny Arsenal, NJ 07806 USA

[3] Army Res Lab, Adelphi, MD 20783 USA

来源：

MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS II | 2010年 / 7679卷

关键词：

SWCNT; microbolometer; IR; sensor; detector; FPA; freestanding network; sacrificial oxide; CARBON NANOTUBES; FILMS;

D O I：

10.1117/12.855589

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have investigated the feasibility of significantly improving the performance of currently favored uncooled infrared (IR) detectors based on Si or VOx microbolometers with a new design employing freestanding suspended network of single-walled carbon nanotubes (SWCNTs). Such networks have high absorption coefficient, high temperature coefficient of the resistance (TCR) and extremely low thermal mass. This combination of parameters translates into an uncooled IR detector with high sensitivity and a very fast temporal response. We show estimates of key parameters for such a device, demonstrate a method to prepare it using suspended SWCNT networks achieved by selective removal of a sacrificial oxide layer, thereby forming a cavity under the SWCNT network. We also present TCR and photothermal bolometric response data of this conceptual structure.

引用

页数：7

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