Pb(Mg,Nb)O3-PbTiO3 thick films on metalized low-temperature co-fired ceramic substrates

被引：0

作者：

Ursic, H. ^{[1
]}

Bencan, A. ^{[1
,2
]}

Khomyakova, E. ^{[1
]}

Drnovsek, S. ^{[1
]}

Mercioniu, I. F. ^{[3
]}

Makarovic, K. ^{[1
,2
,4
]}

Belavic, D. ^{[5
]}

Schreiner, C. ^{[6
]}

Ciobanu, R. ^{[6
]}

Fanjul Bolado, P. ^{[7
]}

Malic, B. ^{[1
]}

机构：

[1] Jozef Stefan Inst, Ljubljana, Slovenia

[2] Ctr Excellence NAMASTE, Ljubljana, Slovenia

[3] Inst Natl Cercetare Dezvoltare Pentru Fiz Mat, Bucharest, Romania

[4] Keko Equipment Ltd, Zuzemberk, Slovenia

[5] HIPOT RR Doo, Otocec, Slovenia

[6] Tech Univ Iasi, Iasi, Romania

[7] DROPSENS, Parque Tecnol Asturias Llanera, Asturias, Spain

来源：

INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS | 2017年 / 47卷 / 02期

关键词：

PMN-PT; piezoelectric; thick film; domain structure; low-temperature co-fired ceramic; LTCC; ELECTRICAL CHARACTERIZATION; LTCC; ALUMINA;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Compatibility of screen-printed piezoelectric 0.65Pb(Mg1/3Nb2/3) O-3-0.35PbTiO(3) thick films with metalized low-temperature co-fired (LTCC) ceramic substrates is examined. Such substrates are interesting for micro-electro mechanical systems, for example for piezoelectric sensors and actuators, where functional layers are usually Pb-based piezoelectrics. In this study the special attention is given to the influence of the Au, Ag and Ag/Pd electrode materials coated over the LTCC on the functional properties of the films. The best phase purity, dielectric and piezoelectric properties were obtained in the films on gilded substrates. No secondary phases were observed at the film/Au interface by scanning electron microscope. The piezoelectric coefficient d(33) of the films on gilded substrates is equal to 120 pC/N.

引用

页码：71 / 78

页数：8

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