Laser material processing with tightly focused cylindrical vector beams

被引:90
作者
Drevinskas, Rokas [1 ]
Zhang, Jingyu [1 ]
Beresna, Martynas [1 ]
Gecevicius, Mindaugas [1 ]
Kazanskii, Andrey G. [2 ]
Svirko, Yuri P. [2 ,3 ]
Kazansky, Peter G. [1 ]
机构
[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
[2] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia
[3] Univ Eastern Finland, Inst Photon, POB 111, FI-80101 Joensuu, Finland
基金
俄罗斯基础研究基金会; 英国工程与自然科学研究理事会;
关键词
POLARIZATION; GENERATION; SURFACE; LIGHT; SPOT;
D O I
10.1063/1.4953455
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate a comprehensive modification study of silica glass, crystalline silicon, and amorphous silicon film, irradiated by tightly focused cylindrical vector beams with azimuthal and radial polarizations. The evidence of the longitudinal field associated with radial polarization is revealed by second harmonic generation in z-cut lithium niobate crystal. Despite the lower threshold of ring-shaped modification of silicon materials, the modification in the center of single pulse radially polarized beam is not observed. The phenomenon is interpreted in terms of the enhanced reflection of longitudinal component at the interface with high-index contrast, demonstrating that the longitudinal component is inefficient for the flat surface modification. Enhanced interaction of the longitudinal light field with silicon nanopillar structures produced by the first pulse of double-pulse irradiation is also demonstrated. Published by AIP Publishing.
引用
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页数:5
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