In situ optical characterization and reengineering of interference coatings

被引：31

作者：

Wilbrandt, Steffen ^{[1
]}

Stenzel, Olaf ^{[1
]}

Kaiser, Norbert ^{[1
]}

Trubetskov, Michael K. ^{[2
]}

Tikhonravo, Alexander V. ^{[2
]}

机构：

[1] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany

[2] Moscow MV Lomonosov State Univ, Ctr Res Comp, Moscow 119992, Russia

来源：

APPLIED OPTICS | 2008年 / 47卷 / 13期

关键词：

D O I：

10.1364/AO.47.000C49

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings. (C) 2008 Optical Society of America.

引用

页码：C49 / C54

页数：6

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