High frequency electrical circuits on a planar lightwave circuit platform

We investigated the propagation losses and the characteristic impedances Z(L) of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 mu m thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan delta). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 mu m thick polyimide. These lower loss MSL's on a PLC-platform can he applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with a Z(L) of 50 Omega was also studied in detail.