Estimation of Electron Densities of Plasmas by Terahertz Time-Domain Spectroscopy

被引：0
|
作者：
Kitahara, Hideaki [1 ]
Ando, Ayumi [1 ]
Kurose, Tomoko [1 ]
Kitano, Katsuhisa [1 ]
Takano, Keisuke [2 ]
Tani, Masahiko [3 ]
Hangyo, Masanori [2 ]
Hamaguchi, Satoshi [1 ]
机构：
[1] Osaka Univ, Ctr Atom & Mol Technol, 2-2 Yamadaoka, Suita, Osaka 5650871, Japan
[2] Osaka Univ, Inst Laser Engn, Osaka 5650871, Japan
[3] Univ Fukui, Res Ctr for Dev Far Infrared Reg, Fukui 910 8507, Japan
来源：
2009 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, VOLS 1 AND 2 | 2009年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new plasma diagnosis tool is developed based on terahertz time-domain spectroscopy (THz-TDS). Electromagnetic wave transmission characteristics of inductively-coupled Ar plasmas are examined by THz-TDS. The electron densities inferred from THz-TDS are found to be in good agreement with those obtained from Langmuir probe measurements.
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页码：205 / +
页数：2
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