Ferroelectric epitaxial thin films for integrated optics

被引:149
作者
Wessels, Bruce W. [1 ]
机构
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Mat Res Ctr, Evanston, IL 60208 USA
关键词
electro-optic; modulator; waveguide; photonic crystal; barium titanate; optical switching;
D O I
10.1146/annurev.matsci.37.052506.084226
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin film ferroelectrics are being developed for integrated optics applications. Their major advantage lies in their large electro-optic coefficients. Furthermore, they are nearly transparent from the mid-infrared to the visible spectral region. With the development of epitaxial deposition techniques for ferroelectrics, waveguide structures with low optical loss have been demonstrated. Through the use of epitaxial thin films deposited on low-index substrates, high-bandwidth electro-optic modulators have also been attained.
引用
收藏
页码:659 / 679
页数:21
相关论文
共 47 条
[1]   SPUTTERING PREPARATION OF FERROELECTRIC PLZT THIN-FILMS AND THEIR OPTICAL APPLICATIONS [J].
ADACHI, H ;
WASA, K .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1991, 38 (06) :645-655
[2]   TRANSMISSION-LINE ASPECTS OF THE DESIGN OF BROAD-BAND ELECTROOPTIC TRAVELING-WAVE MODULATORS [J].
ATSUKI, K ;
YAMASHITA, E .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1987, 5 (03) :316-319
[3]  
DALTON LR, 2004, MRS SPRING M
[4]   Low temperature deposition of epitaxial BaTiO3 films in a rotating disk vertical MOCVD reactor [J].
Dhote, AM ;
Meier, AL ;
Towner, DJ ;
Wessels, BW ;
Ni, J ;
Marks, TJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04) :1674-1678
[5]  
Fork DK, 1995, MATER RES SOC SYMP P, V392, P189, DOI 10.1557/PROC-392-189
[6]   Thin film channel waveguides fabricated in metalorganic chemical vapor deposition grown BaTiO3 on MgO [J].
Gill, DM ;
Block, BA ;
Conrad, CW ;
Wessels, BW ;
Ho, ST .
APPLIED PHYSICS LETTERS, 1996, 69 (20) :2968-2970
[7]   Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3 [J].
Gill, DM ;
Conrad, CW ;
Ford, G ;
Wessels, BW ;
Ho, ST .
APPLIED PHYSICS LETTERS, 1997, 71 (13) :1783-1785
[8]  
GILL DM, 1998, MRS P, V486
[9]   PERFORMANCE AND MODELING OF BROAD-BAND LIBNBO3 TRAVELING-WAVE OPTICAL-INTENSITY MODULATORS [J].
KGOPALAKRISHNAN, GK ;
BURNS, WK ;
MCELHANON, RW ;
BULMER, CH ;
GREENBLATT, AS .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (10) :1807-1819
[10]   Relative dielectric constant of epitaxial BaTiO3 thin films in the GHz frequency range [J].
Hamano, T ;
Towner, DJ ;
Wessels, BW .
APPLIED PHYSICS LETTERS, 2003, 83 (25) :5274-5276