Crystalline/Amorphous Si Integrated Optical Couplers for 2D/3D Interconnection

被引：35

作者：

Itoh, Kazuto ^{[1
]}

Kuno, Yuki ^{[1
]}

Hayashi, Yusuke ^{[1
]}

Suzuki, Junichi ^{[1
]}

Hojo, Naoya ^{[1
]}

Amemiya, Tomohiro ^{[1
,2
]}

Nishiyama, Nobuhiko ^{[1
]}

Arai, Shigehisa ^{[1
,2
]}

机构：

[1] Tokyo Inst Technol, Dept Elect & Elect Engn, Tokyo 1528552, Japan

[2] Tokyo Inst Technol, Quantum Nanoelect Res Tokyo, Tokyo 1528552, Japan

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2016年 / 22卷 / 06期

关键词：

A-Si:H waveguide; multilayer; nonlinearity; trident; SILICON; PLATFORM;

D O I：

10.1109/JSTQE.2016.2566263

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The in-plane and interlayer waveguide-type couplers between crystalline Si and amorphous-Si:H wire waveguides, for 2D/3D hybrid-material integration are presented in this paper. The in-plane-type coupler achieves stable coupling between two waveguides by using tapers located at the tips of the waveguides. The interlayer-type coupler can connect two waveguides, despite an interlayer distance of 1 mu m, with a simple process flow, by introducing a trident structure. An experiment was conducted in which the in-plane and interlayer-type couplers realized low coupling losses ( coupling efficiencies) of 0.16 dB ( 96%) and 0.49 dB ( 89%) per coupler, respectively.

引用

页码：255 / 263

页数：9

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