Fabrication of a Microelectromechanical System Mirror Array and Its Drive Electrodes for Low Electrical Interference in Wavelength-Selective Switches

被引：5

作者：

Sakata, Tomomi ^{[1
]}

Usui, Mitsuo ^{[1
]}

Uchiyama, Shingo ^{[1
]}

Shimoyama, Nobuhiro ^{[1
]}

Kodate, Junichi ^{[1
]}

Ishii, Hiromu ^{[2
]}

Matsuura, Tohru ^{[1
]}

Shimokawa, Fusao ^{[3
]}

Sato, Yasuhiro ^{[1
]}

机构：

[1] NTT Microsyst Integrat Labs, Kanagawa 2430198, Japan

[2] Toyohashi Univ Technol, Head Off Tailor Made & Baton Zone, Grad Course, Aichi 4418580, Japan

[3] Kagawa Univ, Fac Engn, Kagawa 7610396, Japan

来源：

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING | 2011年 / 6卷 / 04期

关键词：

MEMS; electrical interference; WSS;

D O I：

10.1002/tee.20672

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article describes the fabrication of a microelectromechanical system (MEMS) mirror array and mirror-drive electrodes with high-aspect-ratio gold walls that reduce electrical interference in a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, can be fabricated with a high yield by encapsulating the mirrors with an organic film that protects them from process damage. The gold walls with a high-aspect ratio are formed in the narrow space between adjacent mirror-drive electrodes by using thick-multilevel interconnection technology. Because of these walls between adjacent electrodes, each MEMS mirror operates with low electrical interference. (C) 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

引用

页码：384 / 389

页数：6

共 7 条

[1] Fabrication of optical microelectromechanical-system switches having multilevel mirror-drive electrodes [J].

Ishii, H ;

Urano, M ;

Tanabe, Y ;

Shimamura, T ;

Yamaguchi, J ;

Kamei, T ;

Kudou, K ;

Yano, M ;

Uenishi, Y ;

Machida, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (9A) :6468-6472

[2] Novel structure and fabrication process for integrated RF microelectromechanical-system technology [J].

Kuwabara, Kei ;

Urano, Masami ;

Kodate, Junichi ;

Sato, Norio ;

Morimura, Hiroki ;

Sakata, Tomomi ;

Ishii, Hiromu ;

Kamei, Toshikazu ;

Kudou, Kazuhisa ;

Yano, Masaki ;

Machida, Katsuyuki .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (9A) :6849-6853

[3] Wavelength-selective 1 x K switches using free-space optics and MEMS micromirrors:: Theory, design, and implementation [J].

Marom, DM ;

Neilson, DT ;

Greywall, DS ;

Pai, CS ;

Basavanhally, NR ;

Aksyuk, VA ;

López, DO ;

Pardo, F ;

Simon, ME ;

Low, Y ;

Kolodner, P ;

Bolle, CA .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (04) :1620-1630

[4] Low loss fully reconfigurable wavelength-selective optical 1 x N switch based on transversal filter configuration using silica-based planar lightwave circuit [J].

Suzuki, K ;

Mizuno, T ;

Oguma, M ;

Shibata, T ;

Takahashi, H ;

Hibino, Y ;

Himeno, A .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (06) :1480-1482

[5] Open-loop operation of MEMS-based 1 X N wavelength-selective switch with long-term stability and repeatability [J].

Tsai, JC ;

Huang, S ;

Hah, D ;

Toshiyoshi, H ;

Wu, MC .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (04) :1041-1043

[6] NEW H-SHAPE SOFT TORTION SPRING AND ITS MICRO MIRRO R APPLICATION [J].

Uchiyama, Shingo ;

Sato, Makoto ;

Usui, Mitsuo ;

Sakata, Tomomi ;

Shimokawa, Fusao .

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, :819-822

[7]

Usui Mitsuo, 2009, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics. OPT MEMS 2009, P158, DOI 10.1109/OMEMS.2009.5338611

← 1 →