MEMS VIBRATION ELECTRET ENERGY HARVESTER WITH COMBINED ELECTRODES

被引：0
|
作者：
Fu, Qianyan [1 ]
Suzuki, Yuji [1 ]
机构：
[1] Univ Tokyo, Dept Mech Engn, Tokyo 113, Japan
来源：
2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年
关键词：
TRANSDUCERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping-area-change and gap-closing converters is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with the single layer silicon-on-insulator process. Soft X-ray charging is employed to establish uniform surface potential around 60 V on vertical electrets on the sidewall of the comb fingers. Up to 1.6 mu W output power has been obtained, which corresponds to the effectiveness as high as 57%.
引用
收藏
页码：409 / 412
页数：4
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