Dynamics of native point defects in H2 and Ar plasma-etched narrow gap (HgCd)Te

被引:25
作者
Belas, E
Grill, R
Franc, J
Moravec, P
Varghová, R
Höschl, P
Sitter, H
Toth, AL
机构
[1] Charles Univ, Inst Phys, CZ-12116 Prague 2, Czech Republic
[2] Johannes Kepler Univ, Inst Semicond Phys, A-4040 Linz, Austria
[3] MTA MFA, Struct Res, H-1535 Budapest 114, Hungary
关键词
defects; diffusion; reactive ion etching;
D O I
10.1016/S0022-0248(01)00855-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report on a long-run evolution of electrical conductivity sigma (77 K) of n-Hg1-xCdxTe (x = 0.21) samples which were created by reactive ion-etching process (RIE) in hydrogen and argon plasma. We show that after storing at room temperature a(77 K) decreases to less than one half of its initial value in a time interval similar to 2 x 10(5) s. The time of the relaxation is about 1000 times longer than the etching time. The increase of the storing temperature to 323 K results to about 5 times faster rate. In the coincidence with our previous model we interpret the effects as a result of release and diffusion out of donor-like mercury interstitials (Hg-I) captured on defects inside the sample during RIE. The numerical solution of the diffusion equation allows to estimate the diffusion constant of Hg at room temperature > 10(-8) cm(2) s(-1) concentrations of two trap levels similar to 10(16) and 10(15) cm(-3) and respective formation free energies similar to -500 and similar to -600 meV. The traps are interpreted as complexes which are formed by extrinsic acceptors and bound Hg interstitials. The method is proposed to be a proper tool to study the defect structure also in other semiconductors. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:52 / 58
页数:7
相关论文
共 18 条
[1]   ION-BEAM MILLING EFFECT ON ELECTRICAL-PROPERTIES OF HG1-XCDXTE [J].
BAHIR, G ;
FINKMAN, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :348-353
[2]   DEEP P-N-JUNCTION IN HG1-XCDXTE CREATED BY ION MILLING [J].
BELAS, E ;
HOSCHL, P ;
GRILL, R ;
FRANC, J ;
MORAVEC, P ;
LISCHKA, K ;
SITTER, H ;
TOTH, A .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (09) :1695-1699
[3]   ULTRAFAST DIFFUSION OF HG IN HG1-XCDXTE (X-APPROXIMATE-TO-0.21) [J].
BELAS, E ;
HOSCHL, P ;
GRILL, R ;
FRANC, J ;
MORAVEC, P ;
LISCHKA, K ;
SITTER, H ;
TOTH, A .
JOURNAL OF CRYSTAL GROWTH, 1994, 138 (1-4) :940-943
[4]   Determination of the migration energy of Hg interstitials in (HgCd)Te from ion milling experiments [J].
Belas, E ;
Grill, R ;
Franc, J ;
Toth, A ;
Hoschl, P ;
Sitter, H ;
Moravec, P .
JOURNAL OF CRYSTAL GROWTH, 1996, 159 (1-4) :1117-1122
[5]   Type conversion of p-(HgCd)Te using H-2/CH4 and Ar reactive ion etching [J].
Belas, E ;
Franc, J ;
Toth, A ;
Moravec, P ;
Grill, R ;
Sitter, H ;
Hoschl, P .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1996, 11 (07) :1116-1120
[6]  
BELAS E, UNPUB
[7]   1ST PRINCIPLES CALCULATION OF NATIVE DEFECT DENSITIES IN HG0.8CD0.2TE [J].
BERDING, MA ;
VANSCHILFGAARDE, M ;
SHER, A .
PHYSICAL REVIEW B, 1994, 50 (03) :1519-1534
[8]  
DORNHAUS R, 1983, SPRINGER TRACTS MOD, V83, P211
[9]   Derivation of an analytical model to calculate junction depth in HgCdTe photodiodes [J].
Holander-Gleixner, S ;
Robinson, HG ;
Helms, CR .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (03) :1299-1304
[10]   Modeling of junction formation and drive-in in ion implanted HgCdTe [J].
HolanderGleixner, S ;
Williams, BL ;
Robinson, HG ;
Helms, CR .
JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (06) :629-634