cathodoluminescence;
crystal microstructure;
diffusion;
gallium compounds;
III-V semiconductors;
impurities;
MOCVD;
photoluminescence;
point defects;
semiconductor growth;
semiconductor thin films;
stacking faults;
wide band gap semiconductors;
OXIDE;
SEMICONDUCTOR;
INTERFACES;
INSULATOR;
D O I:
10.1063/1.3465524
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The electrical characteristics, in particular interface trap densities, oxide capacitance, and Fermi level movement, of metal oxide semiconductor capacitors with HfO2 gate dielectrics and In0.53Ga0.47As channels are investigated as a function of postdeposition annealing atmosphere. It is shown, using both conductance and Terman methods, that the Fermi level of nitrogen annealed stacks is effectively pinned at midgap. In contrast, samples annealed in forming gas show a large band bending in response to an applied gate voltage and a reduced midgap interface trap density compared to those annealed in nitrogen. (C) 2010 American Institute of Physics. [doi:10.1063/1.3465524]
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kim, Eun Ji
Wang, Lingquan
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Wang, Lingquan
Asbeck, Peter M.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Asbeck, Peter M.
Saraswat, Krishna C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Saraswat, Krishna C.
McIntyre, Paul C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kim, Eun Ji
Chagarov, Evgueni
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Chem & Biochem, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Chagarov, Evgueni
Cagnon, Joel
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Cagnon, Joel
Yuan, Yu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Yuan, Yu
Kummel, Andrew C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Chem & Biochem, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kummel, Andrew C.
Asbeck, Peter M.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Asbeck, Peter M.
Stemmer, Susanne
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stemmer, Susanne
Saraswat, Krishna C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Saraswat, Krishna C.
McIntyre, Paul C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kim, Eun Ji
Wang, Lingquan
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Wang, Lingquan
Asbeck, Peter M.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Asbeck, Peter M.
Saraswat, Krishna C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Saraswat, Krishna C.
McIntyre, Paul C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kim, Eun Ji
Chagarov, Evgueni
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Chem & Biochem, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Chagarov, Evgueni
Cagnon, Joel
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Cagnon, Joel
Yuan, Yu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Yuan, Yu
Kummel, Andrew C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Chem & Biochem, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Kummel, Andrew C.
Asbeck, Peter M.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92093 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Asbeck, Peter M.
Stemmer, Susanne
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stemmer, Susanne
Saraswat, Krishna C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
Saraswat, Krishna C.
McIntyre, Paul C.
论文数: 0引用数: 0
h-index: 0
机构:
Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USAStanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA