Study of delamination of thin film coating on cyclic nano-indentation test

被引:0
作者
Kozuki, Kentaro [1 ]
Omiya, Masaki [1 ]
Kishimoto, Kikuo [2 ]
Inoue, Hirotsugu [1 ]
机构
[1] Tokyo Inst Technol, Dept Mech & Control Engn, Meguro Ku, 2-12-1 Ookayama, Tokyo 1528552, Japan
[2] Tokyo Inst Technol, Dept Mat Sci & Engn, Meguro Ku, Tokyo 1528552, Japan
来源
PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4 | 2007年 / 353-358卷
关键词
thin film; delamination; nano-indentation; cyclic loading; interface; interfacial strength;
D O I
10.4028/www.scientific.net/KEM.353-358.1842
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The aim of this paper is to evaluate the cyclic interfacial strength between thin film and its substrate by cyclic nano-indentation tests. The specimen used in this study is PET substrate/ITO coatings layered specimen. From the indentation load and displacement curve, we proposed an evaluation method for the interfacial strength. The results are good agreement with the interfacial strength evaluated by peel test. After cyclic indentations, the surface profile was observed by atomic force microscope. The number of elongates increased with indentation cycles when the indentation load is low, whereas elongates number is almost constant under high load cases. These phenomena can be explained by simple models. In this study, two types of fracture modes are proposed. They are "subsidiary fracture mode" and "buckling mode".
引用
收藏
页码:1842 / +
页数:2
相关论文
共 10 条
[1]  
FISCHERCRIPPS AC, 2002, MECH ENG SERIES
[2]   Evaluation of interface strength of micro-dot on substrate by means of AFM [J].
Hirakata, H ;
Kitamura, T ;
Yamamoto, Y .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2004, 41 (11-12) :3243-3253
[3]   Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates [J].
Jeon, I ;
Omiya, M ;
Kishimoto, K ;
Asahina, T ;
Im, S .
SENSORS AND ACTUATORS A-PHYSICAL, 2005, 122 (02) :291-300
[4]   A new systematic method of characterization for the strength of thin films on substrates -: evaluation of mechanical properties by means of 'film projection' [J].
Kamiya, S ;
Kimura, H ;
Yamanobe, K ;
Saka, M ;
Abé, H .
THIN SOLID FILMS, 2002, 414 (01) :91-98
[5]   Fracture mechanics of bonding interface: a cohesive zone model [J].
Kishimoto, K ;
Omiya, M ;
Yang, W .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 99 (1-2) :198-206
[6]   A continuum interface debonding model and application to matrix cracking of composites [J].
Ma, FS ;
Kishimoto, K .
JSME INTERNATIONAL JOURNAL SERIES A-MECHANICS AND MATERIAL ENGINEERING, 1996, 39 (04) :496-507
[7]   UV-irradiation effects on interfacial strength between thin ceramic film and polymer substrate [J].
Omiya, M ;
Inoue, H ;
Kishimoto, K ;
Yanaka, M ;
Ihashi, N .
ADVANCES IN FRACTURE AND STRENGTH, PTS 1- 4, 2005, 297-300 :2284-2289
[8]   Interface debonding model and its application to the mixed mode interface fracture toughness [J].
Omiya, M ;
Kishimoto, K .
INTERNATIONAL JOURNAL OF DAMAGE MECHANICS, 2002, 11 (03) :263-286
[9]   Backward deviation and depth recovery of load-displacement curves of amorphous SiC film under repeating nanoindentation [J].
Raju, TD ;
Kato, M ;
Nakasa, K .
ACTA MATERIALIA, 2003, 51 (12) :3585-3595
[10]   Interfacial toughness measurements for thin films on substrates [J].
Volinsky, AA ;
Moody, NR ;
Gerberich, WW .
ACTA MATERIALIA, 2002, 50 (03) :441-466