High performance ZnS antireflection sub-wavelength structures with HfO2 protective film for infrared optical windows

被引：18

作者：

Liu, Fei ^{[1
,2
]}

Jiao, Hongfei ^{[1
,2
]}

Zhang, Jinlong ^{[1
,2
]}

Yin, Bin ^{[3
]}

Liu, Huasong ^{[4
]}

Ji, Yiqin ^{[4
]}

Wang, Zhanshan ^{[1
,2
]}

Cheng, Xinbin ^{[1
,2
]}

机构：

[1] MOE Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China

[2] Tone Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, Shanghai 200092, Peoples R China

[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

[4] Tianjin Jinhang Inst Tech Phys, Tianjin Key Lab Opt Thin Film, Tianjin 300192, Peoples R China

来源：

OPTICS EXPRESS | 2021年 / 29卷 / 20期

基金：

中国国家自然科学基金;

关键词：

FABRICATION; SURFACES;

D O I：

10.1364/OE.439405

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Antireflection sub-wavelength structures (SWSs) on ZnS were designed and ZnS SWSs with HfO2 protective film were prepared, and their properties in long-wave infrared applications were examined and compared to AR coatings. The SWS has good antireflection performance and exhibits less polarization sensitivity than the AR coating. At temperatures above 500 degrees C, the SWS with HfO2 protective film has a better thermal endurance property than the multilayer AR coating. Moreover, the HfO2 protective film significantly improved the mechanical properties of the ZnS SWS and was similar to HfO2 covered AR coating when the HfO2 film was not broken. This study shows that the ZnS SWS with HfO2 protective film has promising application prospects in infrared optical windows. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：31058 / 31067

页数：10

共 32 条

[1] Self-assembled self-cleaning broadband anti-reflection coatings [J].

Askar, Khalid ;

Phillips, Blayne M. ;

Fang, Yin ;

Choi, Baeck ;

Gozubenli, Numan ;

Jiang, Peng ;

Jiang, Bin .

COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2013, 439 :84-100

[2] Nanostructuring of GaAs with tailored topologies using colloidal lithography and dry etching [J].

Awan, Kashif Masud ;

Sanatinia, Reza ;

Anand, Srinivasan .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (02)

[3] Review of antireflective surface structures on laser optics and windows [J].

Busse, Lynda E. ;

Frantz, Jesse A. ;

Shaw, L. Brandon ;

Aggarwal, Ishwar D. ;

Sanghera, Jasbinder S. .

APPLIED OPTICS, 2015, 54 (31) :F303-F310

[4] Biomimetic nanostructures in ZnS and ZnSe provide broadband anti-reflectivity [J].

Chan, L. ;

DeCuir, E. A., Jr. ;

Fu, R. ;

Morse, D. E. ;

Gordon, M. J. .

JOURNAL OF OPTICS, 2017, 19 (11)

[5] Waterproof coatings for high-power laser cavities [J].

Cheng, Xinbin ;

Dong, Siyu ;

Zhi, Song ;

Paschel, Sebastian ;

Balasa, Istvan ;

Ristau, Detlev ;

Wang, Zhanshan .

LIGHT-SCIENCE & APPLICATIONS, 2019, 8 (1)

[6] REDUCTION OF LENS REFLECTION BY MOTH EYE PRINCIPLE [J].

CLAPHAM, PB ;

HUTLEY, MC .

NATURE, 1973, 244 (5414) :281-282

[7] Nanostructured Stealth Surfaces for Visible and Near-Infrared Light [J].

Diao, Z. ;

Kraus, M. ;

Brunner, R. ;

Dirks, J. -H. ;

Spatz, J. P. .

NANO LETTERS, 2016, 16 (10) :6610-6616

[8]

Harris D. C., 1999, MAT INFRARED WINDOWS, P158

[9] Laser damage resistant anti-reflection microstructures for mid-infrared metal-ion doped ZnSe gain media [J].

Hobbs, Douglas S. ;

MacLeod, Bruce D. ;

Sabatino, Ernest, III ;

Mirov, Sergey B. ;

Martyshkin, Dmitri V. .

LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2012, 2012, 8530

[10] Design, fabrication, and measured performance of anti-reflecting surface textures in infrared transmitting materials [J].

Hobbs, DS ;

MacLeod, BD .

Window and Dome Technologies and Materials IX, 2005, 5786 :349-364

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