Optoelectronic CMOS Transistors: Performance Advantages for Sub-7nm ULSI, RF ASIC, Memories, and Power MOSFETs

被引:2
作者
Pan, James N. [1 ]
机构
[1] AELC, Linthicum, MD 21090 USA
关键词
microelectronics; optoelectronic; photonic; electronic material; laser;
D O I
10.1557/adv.2019.211
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Substantial increase of output current, and I-on / I-off ratio for sub-7nm low power CMOS transistors, can be accomplished using a novel optoelectronic technology, which is 100% compatible with existing CMOS process flow. For RF or mixed signal ASICs, adding photonic components may improve the cut-off frequency, and reduce series resistance. Products that utilize power regulating devices, such as power MOSFETs, will benefit from the optoelectronic configuration to achieve much lower R-dson and high voltage at the same time. For semiconductor memories, such as DRAM or FLASH, the photonic technique may reduce the ERASE / WRITE / access time and improve the reliability.
引用
收藏
页码:2585 / 2591
页数:7
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