Recent progress in optoelectronic applications of hybrid 2D/3D silicon-based heterostructures

被引:15
作者
Zhou, Jingshu [1 ,2 ]
Xin, Kaiyao [1 ]
Zhao, Xiangkai [3 ]
Li, Dongmei [3 ]
Wei, Zhongming [1 ]
Xia, Jianbai [1 ]
机构
[1] Chinese Acad Sci, State Key Lab Superlattices & Microstruct, Inst Semicond, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, Optoelect Syst Lab, Beijing 10083, Peoples R China
基金
中国国家自然科学基金;
关键词
silicon; 2D/3D; hybrid heterostructure; optoelectronic application; DEEP-ULTRAVIOLET PHOTODETECTOR; IN-SITU FABRICATION; BROAD-BAND; ENHANCED PHOTORESPONSIVITY; GRAPHENE PHOTODETECTOR; LIQUID EXFOLIATION; HIGH-DETECTIVITY; MOS2; HETEROJUNCTION; MONOLAYER;
D O I
10.1007/s40843-021-1939-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Silicon-based semiconductor technology has made great breakthroughs in the past few decades, but it is reaching the physical limits of Moore's law. In recent years, the presence of two-dimensional (2D) materials was regarded as an opportunity to break the limitation of traditional silicon-based optoelectronic devices owing to their special structure and superior properties. In consideration of the widely studied hybrid integration of 2D material detectors and 3D silicon-based systems, in this paper, the basic properties of several 2D materials used in photodetectors are summarized. Subsequently, the progress in silicon photonic integrated photo-detectors based on 2D materials is reviewed, followed by the summarization of the device structure and main performances. Then, the combination of some other traditional and 2D devices is discussed as a supplement. Finally, the prospective development of the hybrid 2D/3D silicon-based heterostructures is expected.
引用
收藏
页码:876 / 895
页数:20
相关论文
共 121 条
[41]   Direct and Indirect Band-to-Band Tunneling in Germanium-Based TFETs [J].
Kao, Kuo-Hsing ;
Verhulst, Anne S. ;
Vandenberghe, William G. ;
Soree, Bart ;
Groeseneken, Guido ;
De Meyer, Kristin .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2012, 59 (02) :292-301
[42]   Growth of Wafer-Scale Standing Layers of WS2 for Self-Biased High-Speed UV-Visible-NIR Optoelectronic Devices [J].
Kim, Hong-Sik ;
Patel, Malkeshkumar ;
Kim, Joondong ;
Jeong, Mun Seok .
ACS APPLIED MATERIALS & INTERFACES, 2018, 10 (04) :3964-3974
[43]   Actively variable-spectrum optoelectronics with black phosphorus [J].
Kim, Hyungjin ;
Uddin, Shiekh Zia ;
Lien, Der-Hsien ;
Yeh, Matthew ;
Azar, Nima Sefidmooye ;
Balendhran, Sivacarendran ;
Kim, Taehun ;
Gupta, Niharika ;
Rho, Yoonsoo ;
Grigoropoulos, Costas P. ;
Crozier, Kenneth B. ;
Javey, Ali .
NATURE, 2021, 596 (7871) :232-+
[44]   High-performance near-infrared photodetector based on nano-layered MoSe2 [J].
Ko, Pil Ju ;
Abderrahmane, Abdelkader ;
Kim, Nam-Hoon ;
Sandhu, Adarsh .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2017, 32 (06)
[45]   Epitaxial growth and layer-transfer techniques for heterogeneous integration of materials for electronic and photonic devices [J].
Kum, Hyun ;
Lee, Doeon ;
Kong, Wei ;
Kim, Hyunseok ;
Park, Yongmo ;
Kim, Yunjo ;
Baek, Yongmin ;
Bae, Sang-Hoon ;
Lee, Kyusang ;
Kim, Jeehwan .
NATURE ELECTRONICS, 2019, 2 (10) :439-450
[46]   Exciton diffusion in monolayer and bulk MoSe2 [J].
Kumar, Nardeep ;
Cui, Qiannan ;
Ceballos, Frank ;
He, Dawei ;
Wang, Yongsheng ;
Zhao, Hui .
NANOSCALE, 2014, 6 (09) :4915-4919
[47]   Towards quantum-limited coherent detection of terahertz waves in charge-neutral graphene [J].
Lara-Avila, S. ;
Danilov, A. ;
Golubev, D. ;
He, H. ;
Kim, K. H. ;
Yakimova, R. ;
Lombardi, F. ;
Bauch, T. ;
Cherednichenko, S. ;
Kubatkin, S. .
NATURE ASTRONOMY, 2019, 3 (11) :983-988
[48]  
Li LK, 2014, NAT NANOTECHNOL, V9, P372, DOI [10.1038/nnano.2014.35, 10.1038/NNANO.2014.35]
[49]   Ultra-sensitive self-powered photodetector based on vertical MoTe2/MoS2 heterostructure [J].
Li, Shangdong ;
He, Zhenbei ;
Ke, Yizhen ;
Guo, Junxiong ;
Cheng, Tiedong ;
Gong, Tianxun ;
Lin, Yuan ;
Liu, Zhiwei ;
Huang, Wen ;
Zhang, Xiaosheng .
APPLIED PHYSICS EXPRESS, 2020, 13 (01)
[50]   High Detectivity Graphene-Silicon Heterojunction Photodetector [J].
Li, Xinming ;
Zhu, Miao ;
Du, Mingde ;
Lv, Zheng ;
Zhang, Li ;
Li, Yuanchang ;
Yang, Yao ;
Yang, Tingting ;
Li, Xiao ;
Wang, Kunlin ;
Zhu, Hongwei ;
Fang, Ying .
SMALL, 2016, 12 (05) :595-601