Characterization of sol-gel derived (Pb,La)TiO3 pyroelectric thin film detectors

被引：0
作者：
Chen, YC [1 ]
Wang, CM [1 ]
Huang, YT [1 ]
Kao, MC [1 ]
机构：
[1] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung 804, Taiwan
来源：
PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II | 2001年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
La-modified lead titanate (PLT) thin films were deposited on Pt/SiO2/Si substrates by spin coating with sol-gel processing. 1,3-propandiol was used as solvent to minimize the number of cycles of spin coating and drying processes to obtain the desired thickness of high quality thin film. The randomly oriented PLT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. Pyroelectric infrared (IR) detectors have been fabricated without the back side etching process. The pyroelectric characteristics of point detectors with various La contents as a function of modulation frequency are compared. It was found that the PLT(10) detector has a large voltage responsivity of 3330 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 6.2 x 10(7) cmHz(1/2)/W. The results showed that Pb1-xLaxTi1-x/4O3 thin film with x=0.10 [PLT(10)] was most suitable for use as a pyroelectric IR detector.
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页码：227 / 230
页数：4
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