CHOICE OF GATE INSULATOR FOR TUNNELLING CURRENT MINIMIZATION AND EFFECTIVE GATE ELECTROSTATICS IN DOUBLE GATE NANOSCALE MOSFET

被引:0
作者
Thriveni, G. [1 ]
Ghosh, Kaustab [1 ]
机构
[1] VIT Univ, Sch Elect Engn SENSE, Vandalur Kelambakkam Rd, Chennai 600127, Tamil Nadu, India
来源
2018 4TH INTERNATIONAL CONFERENCE ON DEVICES, CIRCUITS AND SYSTEMS (ICDCS) | 2018年
关键词
Double gate nanoMOSFET; tunnelling current; high-k dielectrics; numerical model; self-consistent Poisson's solver;
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
A numerical model using self consistent Poisson's equation solver is presented to elucidate the potential profile and current-voltage characteristics of double gate nanoMOSFET using 32nm technology. Here we have explored the performance of the nanodevice with different dielectric layers. The focus of this work is to identify the type of gate dielectric material which is capable enough to control the electrostatics across the channel through gate bias and reduce the tunneling current. We find that TiO2 layer having k=80 produces higher tunneling current through gate leakage although it exhibited stronger gate control on the channel conduction. A combination of TiO2 and SiO2 dielectric layers is proposed to mitigate tunnelling in these devices and improve its performance.
引用
收藏
页码:34 / 36
页数:3
相关论文
共 12 条
  • [1] Gate tunneling current and quantum capacitance in metal-oxide-semiconductor devices with graphene gate electrodes
    An, Yanbin
    Shekhawat, Aniruddh
    Behnam, Ashkan
    Pop, Eric
    Ural, Ant
    [J]. APPLIED PHYSICS LETTERS, 2016, 109 (22)
  • [2] TUNNELING IN METAL-OXIDE-SILICON STRUCTURES
    DAHLKE, WE
    SZE, SM
    [J]. SOLID-STATE ELECTRONICS, 1967, 10 (08) : 865 - &
  • [3] Datta S., 2017, Lessons from Nanoelectronics: A New Perspective on TransportBasic Concepts, V2nd
  • [4] Gupta T, 2009, COPPER INTERCONNECT TECHNOLOGY, P1, DOI 10.1007/978-1-4419-0076-0
  • [5] RESOLVED QUADRUPOLAR TRANSITION IN TIO2
    PASCUAL, J
    CAMASSEL, J
    MATHIEU, H
    [J]. PHYSICAL REVIEW LETTERS, 1977, 39 (23) : 1490 - 1493
  • [6] A review of gate tunneling current in MOS devices
    Ranuarez, Juan C.
    Deen, M. J.
    Chen, Chih-Hung
    [J]. MICROELECTRONICS RELIABILITY, 2006, 46 (12) : 1939 - 1956
  • [7] Optimum High-k Oxide for the Best Performance of Ultra-Scaled Double-Gate MOSFETs
    Salmani-Jelodar, Mehdi
    Ilatikhameneh, Hesameddin
    Kim, Sungguen
    Ng, Kwok
    Sarangapani, Prasad
    Klimeck, Gerhard
    [J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2016, 15 (06) : 904 - 910
  • [8] ON TUNNELING IN METAL-OXIDE-SILICON STRUCTURES
    WEINBERG, ZA
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (07) : 5052 - 5056
  • [9] On the scaling issues and high-κ replacement of ultrathin gate dielectrics for nanoscale MOS transistors
    Wong, Hei
    Iwai, Hiroshi
    [J]. MICROELECTRONIC ENGINEERING, 2006, 83 (10) : 1867 - 1904
  • [10] Analysis of Short-Channel Effects in Junctionless DG MOSFETs
    Xie, Qian
    Wang, Zheng
    Taur, Yuan
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (08) : 3511 - 3514