Thermodynamics of fluorine incorporation into silica glass

被引：17

作者：

Kirchhof, J. ^{[1
]}

Unger, S. ^{[1
]}

机构：

[1] Inst Photon Technol, Opt Fibers & Fiber Applicat Div, D-07702 Jena, Germany

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2008年 / 354卷 / 2-9期

关键词：

optical fibers; chemical vapor deposition; glass formation; glasses; silica; thermodynamics;

D O I：

10.1016/j.jnoncrysol.2007.08.084

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Fluorine incorporation from the gaseous phase into silica glass was investigated both during the deposition of synthetic silica layers and during the sintering of pre-deposited porous silica layers, using different fluorine-containing compounds. The fluorine content dependence on the gas concentration and the influence of fluorine on the deposition efficiency of silica were determined. The results could be interpreted and quantitatively described by a simplified model of the equilibrium chemistry, valid for different fluorine sources. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：540 / 545

页数：6

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