Calculation of the saw-induced stress distributions in an electrode of a saw-device on LiTAO3

被引：0

作者：

Kubat, F ^{[1
]}

Ruile, W ^{[1
]}

Rösler, U ^{[1
]}

Ruppel, CCW ^{[1
]}

Reindl, LM ^{[1
]}

机构：

[1] EPCOS AG, Munich, Germany

来源：

2004 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-3 | 2004年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Acoustomigration is a well-known phenomenon, which may occur in Surface Acoustic Wave (SAW)-devices operating at high driving levels. Based on previously published reports [1-3] about calculation of the acoustic power, dynamic stresses and displacements in a homogenous isotropic A1-layer for a given driving, condition, we expand this method for the calculation of the SAW-induced stress in an electrode of a SAW-device. The quantitative calculation of this stress is based on the combination of the widely used P-Matrix based model, which yields the distribution of the potential power [2] for a given driving level and a FEM tool [4], which provides the relative stresses inside an electrode.

引用

页码：437 / 440

页数：4

共 10 条

[1]

Auld B.A., 1973, ACOUSTIC FIELDS WAVE

[2]

Ebata Y, 1998, ULTRASON, P257, DOI 10.1109/ULTSYM.1998.762140

[3]

EBERL C, 2004, IN PRESS TMS ANN M

[4]

HESJEDEL T, 2003, IEEE ULTRASON S P, P1483

[5]

KABUT F, 2003, IEEE ULTRASON S P, P312

[6]

KUBAT F, 2002, IEEE ULTRASON S P, P317

[7]

Raml G, 2001, ULTRASON, P153, DOI 10.1109/ULTSYM.2001.991598

[8]

Rosler U, 1996, ULTRASON, P1, DOI 10.1109/ULTSYM.1996.583766

[9]

Ruile W, 2000, ULTRASON, P275, DOI 10.1109/ULTSYM.2000.922555

[10]

SMOLE P, 2002, IEEE P ULTRASON S, P296

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