Study of the multilayer metallic films topography modified by laser interference irradiation

被引:34
作者
Lasagni, A [1 ]
Mücklich, F [1 ]
机构
[1] Univ Saarland, Dept Mat Sci, D-66041 Saarbrucken, Germany
关键词
thermal simulation; topography; laser interference; Fe-Al; Fe-Ni; Ti-Al; Ti-Ni;
D O I
10.1016/j.apsusc.2004.06.143
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The thin bimetallic film systems Fe-Al, Fe-Ni, Ti-Al, and Ti-Ni were irradiated using a laser interference pattern with laser fluence values from 50 to 250 mJ/cm(2). The thermal simulation was carried out to analyze the topographical effects. It was found that according to the laser fluence value, three different types of topographies can be obtained. For lower laser fluence values, the molten material in the lower layer induces deformation over the upper one obtaining a periodic pattern with a structure depth in the order of the layer thickness. If the laser fluence is high enough so that the upper layer reaches the melting point, this last is broken obtaining a high structured pattern consisting on a large depression and next two consecutive peaks. This threshold value can be estimated using the thermal simulation calculating the laser fluence at which the upper layer starts to melt. For higher laser fluence values, this pattern transforms into a periodical peak-valley structure with high structure depth. In both last two cases, the material at the interference peaks is removed. A model is suggested for explaining this behavior. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:214 / 221
页数:8
相关论文
共 16 条
[1]   Analysis of laser absorption on a rough metal surface [J].
Ang, LK ;
Lau, YY ;
Gilgenbach, RM ;
Spindler, HL .
APPLIED PHYSICS LETTERS, 1997, 70 (06) :696-698
[2]  
[Anonymous], 2001, HDB LASER MAT PROCES
[3]  
BARCKSTROM G, 1998, FIELDS PHYS FINITE E
[4]   Periodical micro-nano-structuring of metallic surfaces by interfering laser beams [J].
Daniel, C ;
Mücklich, F ;
Liu, Z .
APPLIED SURFACE SCIENCE, 2003, 208 :317-321
[5]   HIGH-PRECISION REFLECTOMETER FOR SUBMILLIMETER WAVELENGTHS [J].
GATESMAN, AJ ;
GILES, RH ;
WALDMAN, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1995, 12 (02) :212-219
[6]  
Kelly MK, 1998, PHYS STATUS SOLIDI A, V166, P651, DOI 10.1002/(SICI)1521-396X(199804)166:2<651::AID-PSSA651>3.0.CO
[7]  
2-P
[8]   Extended resolution for lateral structuring with laser interference gratings using high-index input coupling [J].
Kelly, MK ;
Dahlheimer, B .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1996, 156 (02) :K13-K16
[9]  
LASAGNI A, 2004, MODEL SIMUL MATER SC, V12, P1
[10]  
Linde DR, 1993, CRC HDB CHEM PHYS