ZnO-Based Ultraviolet Photodetectors

被引:606
作者
Liu, Kewei [1 ]
Sakurai, Makoto [1 ]
Aono, Masakazu [1 ]
机构
[1] Natl Inst Mat Sci NIMS, Int Ctr Mat Nanoarchitecton MANA, Tsukuba, Ibaraki 3050044, Japan
关键词
ZnO; photodetector; MSM; p-n junction; Schottky; response; TRANSPARENT OXIDE SEMICONDUCTORS; MOLECULAR-BEAM-EPITAXY; PHOTOCONDUCTIVE DETECTOR; UV-DETECTOR; METAL PHOTODIODES; VISIBLE-BLIND; THIN-FILMS; FABRICATION; MGXZN1-XO; PHOTORESPONSE;
D O I
10.3390/s100908604
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Ultraviolet (UV) photodetection has drawn a great deal of attention in recent years due to a wide range of civil and military applications. Because of its wide band gap, low cost, strong radiation hardness and high chemical stability, ZnO are regarded as one of the most promising candidates for UV photodetectors. Additionally, doping in ZnO with Mg elements can adjust the bandgap largely and make it feasible to prepare UV photodetectors with different cut-off wavelengths. ZnO-based photoconductors, Schottky photodiodes, metal-semiconductor-metal photodiodes and p-n junction photodetectors have been developed. In this work, it mainly focuses on the ZnO and ZnMgO films photodetectors. We analyze the performance of ZnO-based photodetectors, discussing recent achievements, and comparing the characteristics of the various photodetector structures developed to date.
引用
收藏
页码:8604 / 8634
页数:31
相关论文
共 108 条
  • [1] Effect of thermal treatment on the performance of ZnO based metal-insulator-semiconductor ultraviolet photodetectors
    Ali, Ghusoon M.
    Chakrabarti, P.
    [J]. APPLIED PHYSICS LETTERS, 2010, 97 (03)
  • [2] Photoresponse of n-ZnO/p-SiC heterojunction diodes grown by plasma-assisted molecular-beam epitaxy -: art. no. 241108
    Alivov, YI
    Özgür, Ü
    Dogan, S
    Johnstone, D
    Avrutin, V
    Onojima, N
    Liu, C
    Xie, J
    Fan, Q
    Morkoç, H
    [J]. APPLIED PHYSICS LETTERS, 2005, 86 (24) : 1 - 3
  • [3] Electrical characterization of 1.8 MeV proton-bombarded ZnO
    Auret, FD
    Goodman, SA
    Hayes, M
    Legodi, MJ
    van Laarhoven, HA
    Look, DC
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (19) : 3074 - 3076
  • [4] Photoconductive UV detectors on sol-gel-synthesized ZnO films
    Basak, D
    Amin, G
    Mallik, B
    Paul, GK
    Sen, SK
    [J]. JOURNAL OF CRYSTAL GROWTH, 2003, 256 (1-2) : 73 - 77
  • [5] A Back-Illuminated Vertical-Structure Ultraviolet Photodetector Based on an RF-Sputtered ZnO Film
    Bi, Zhen
    Yang, Xiaodong
    Zhang, Jingwen
    Bian, Xuming
    Wang, Dong
    Zhang, Xinan
    Hou, Xun
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2009, 38 (04) : 609 - 612
  • [6] ZnO photoconductive sensors epitaxially grown on sapphire substrates
    Chang, S. P.
    Chang, S. J.
    Chiou, Y. Z.
    Lu, C. Y.
    Lin, T. K.
    Lin, Y. C.
    Kuo, C. F.
    Chang, H. M.
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2007, 140 (01) : 60 - 64
  • [7] Surface HCl treatment in ZnO photoconductive sensors
    Chang, S. P.
    Chuang, R. W.
    Chang, S. J.
    Lu, C. Y.
    Chiou, Y. Z.
    Hsieh, S. F.
    [J]. THIN SOLID FILMS, 2009, 517 (17) : 5050 - 5053
  • [8] Nanoparticle-coated n-ZnO/p-Si photodiodes with improved photoresponsivities and acceptance angles for potential solar cell applications
    Chen, Cheng-Pin
    Lin, Pei-Hsuan
    Chen, Liang-Yi
    Ke, Min-Yung
    Cheng, Yun-Wei
    Huang, JianJang
    [J]. NANOTECHNOLOGY, 2009, 20 (24)
  • [9] Photoresponsivity enhancement of ZnO/Si photodiodes through use of an ultrathin oxide interlayer
    Chen, L. -C.
    Pan, C. -N.
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2008, 44 (01) : 43 - 46
  • [10] GaN photodetectors with transparent indium tin oxide electrodes
    Chiou, YZ
    Tang, JJ
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (7A): : 4146 - 4149