Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modeling and data processing

被引：18

作者：

Calaza, C ^{[1
]}

Meca, E

Marco, S

Moreno, M

Samitier, J

Fonseca, L

Gràcia, I

Cané, C

机构：

[1] Univ Barcelona, Instrumentat & Commun Syst Grp, SIC, Dept Elect, Barcelona, Spain

[2] CSIC, IMB, Ctr Nacl Microelect, Barcelona, Spain

来源：

IEEE SENSORS JOURNAL | 2003年 / 3卷 / 05期

关键词：

Fabry-Perot; non-dispersive infrared (NDIR); partial least squares (PLS) regression; surface micromachining; thermopiles;

D O I：

10.1109/JSEN.2003.817672

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

\Abstract-A model of a miniaturized non-dispersive infrared (NDIR) gas analysis system, aiming to predict the final system specifications, is presented. It comprises the different elements of the NDIR detector, including a surface micromachined Fabry-Perot tunable filter. These models have been used to estimate the response of the NDIR system to different gas mixtures. Multivariate regression methods like partial least squares allow recovering the true sample composition from the IR absorption spectra measured with the NDIR system, despite the limited selectivity of the filter. Combining model and data processing permits to predict the effect on the final system specification of design parameters. Here, we compare the effect of the technology used for the filter on the system errors.

引用

页码：587 / 594

页数：8

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