Capacitor-couple ESD protection circuit for deep-submicron low-voltage CMOS ASIC

被引:44
作者
Ker, MD
Wu, CY
Cheng, T
Chang, HH
机构
[1] Integrated Circuits and Systems Laboratory, Institute of Electronics, National Chiao-Tung University, Hsinchu
关键词
D O I
10.1109/92.532032
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Capacitor-couple technique used to lower snapback-trigger voltage and to ensure uniform ESD current distribution in deep-submicron CMOS on-chip ESD protection circuit is proposed, The coupling capacitor is realized by a poly layer right under the wire-bonding metal pad without increasing extra layout area to the pad. A timing-original design model has been derived to calculate the capacitor-couple efficiency of this proposed ESD protection circuit, Using this capacitor-couple ESD protection circuit, the thinner gate oxide of CMOS devices in deep-submicron low-voltage CMOS ASIC can be effectively protected.
引用
收藏
页码:307 / 321
页数:15
相关论文
共 21 条
[1]  
AMERASEKERA A, 1994, EOS ESD S P, V16, P237
[2]   A LOW-VOLTAGE TRIGGERING SCR FOR ON-CHIP ESD PROTECTION AT OUTPUT AND INPUT PADS [J].
CHATTERJEE, A ;
POLGREEN, T .
IEEE ELECTRON DEVICE LETTERS, 1991, 12 (01) :21-22
[3]   THE EFFECTS OF INTERCONNECT PROCESS AND SNAPBACK VOLTAGE ON THE ESD FAILURE THRESHOLD OF NMOS TRANSISTORS [J].
CHEN, KL .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (12) :2140-2150
[4]  
COOK C, 1993, EOS ESD S P, V15, P149
[5]  
DANIEL S, 1990, EOS ESD S P, V12, P206
[6]  
DIAZ C, 1995, P IRPS, P276
[7]   ESD - A PERVASIVE RELIABILITY CONCERN FOR IC TECHNOLOGIES [J].
DUVVURY, C ;
AMERASEKERA, A .
PROCEEDINGS OF THE IEEE, 1993, 81 (05) :690-702
[8]   INTERNAL CHIP ESD PHENOMENA BEYOND THE PROTECTION CIRCUIT [J].
DUVVURY, C ;
ROUNTREE, RN .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (12) :2133-2139
[9]  
DUVVURY C, 1992, DEC IEEE INT EL DEV, P131
[10]  
DUVVURY C, 1992, P IRPS, P141