Flexible PDMS micro-lens array with programmable focus gradient fabricated by dielectrophoresis force

被引:18
作者
Wang, Yu-Chi [1 ]
Tsai, Yao-Chuan [1 ]
Shih, Wen-Pin [1 ]
机构
[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan
关键词
Dielectrophoresis; Micro-lens array; PDMS; Flexible substrate;
D O I
10.1016/j.mee.2011.01.041
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Micro-lens arrays with programmable focus gradient were fabricated using polydimethylsiloxane (PDMS) droplets on a polyethylene (PE) membrane which isolates PDMS from concentric circular electrodes. The copper electrodes were patterned on a flexible print circuit so that gradient voltages could be applied on the droplets to generate dielectrophoresis forces of gradient magnitudes. The radii of curvature of the droplets changed from 0.9 to 1.6 mm when the applied bias voltage increased from 0 to 350 V. After curing the PDMS lenses, the PE substrate was peeled off to form a flexible PDMS micro-lens array. An 8 x 8 lens-array with focus gradient has been demonstrated. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:2748 / 2750
页数:3
相关论文
共 11 条
[1]   Variable focus dielectric liquid droplet lens [J].
Cheng, CC ;
Chang, CA ;
Yeh, JA .
OPTICS EXPRESS, 2006, 14 (09) :4101-4106
[2]   High-resolution digital integral photography by use of a scanning microlens array [J].
Erdmann, L ;
Gabriel, KJ .
APPLIED OPTICS, 2001, 40 (31) :5592-5599
[3]   A novel boundary-confined method for high numerical aperture microlens array fabrication [J].
Hsieh, Hsin-Ta ;
Su, Guo-Dung John .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (03)
[4]   Investigation of the Deposition of Microsphere Monolayers for Fabrication of Microlens Arrays [J].
Kumnorkaew, Pisist ;
Ee, Yik-Khoon ;
Tansu, Nelson ;
Gilchrist, James F. .
LANGMUIR, 2008, 24 (21) :12150-12157
[5]   Enhanced out-coupling factor of microcavity organic light-emitting devices with irregular microlens array [J].
Lim, Jongsun ;
Oh, Seung Seok ;
Kim, Doo Youp ;
Cho, Sang Hee ;
Kim, In Tae ;
Han, S. H. ;
Takezoe, Hideo ;
Choi, Eun Ha ;
Cho, Guang Sup ;
Seo, Yoon Ho ;
Kang, Seung Oun ;
Park, Byoungchoo .
OPTICS EXPRESS, 2006, 14 (14) :6564-6571
[6]   Concave microlens array mold fabrication in photoresist using UV proximity printing [J].
Lin, Tsung-Hung ;
Yang, Hsiharng ;
Chao, Ching-Kong .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (11-12) :1537-1543
[7]   Direct write of microlens array using digital projection photopolymerization [J].
Lu, Yi ;
Chen, Shaochen .
APPLIED PHYSICS LETTERS, 2008, 92 (04)
[8]   A new method for fabricating high density and large aperture ratio liquid microlens array [J].
Ren, Hongwen ;
Ren, Daqiu ;
Wu, Shin-Tson .
OPTICS EXPRESS, 2009, 17 (26) :24183-24188
[9]   Microlens array fabrication by enhanced thermal reflow process: Towards efficient collection of fluorescence light from microarrays [J].
Roy, E. ;
Voisin, B. ;
Gravel, J. -F. ;
Peytavi, R. ;
Boudreau, D. ;
Veres, T. .
MICROELECTRONIC ENGINEERING, 2009, 86 (11) :2255-2261
[10]  
Wul C.Y., 2008, OPT EXPRESS, V16, P19978