Interferometric measurement of surface shape by wavelength tuning suppressing random intensity error

被引：7

作者：

Kim, Yangjin ^{[1
]}

Hibino, Kenichi ^{[2
]}

Sugita, Naohiko ^{[1
]}

Mitsuishi, Mamoru ^{[1
]}

机构：

[1] Univ Tokyo, Dept Mech Engn, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[2] Natl Inst Adv Ind Sci & Technol, 1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan

来源：

APPLIED OPTICS | 2016年 / 55卷 / 23期

关键词：

PHASE-SHIFTING INTERFEROMETRY; COMPENSATING ALGORITHMS; OPTICAL-THICKNESS; DESIGN; DERIVATION; WAFER; NOISE;

D O I：

10.1364/AO.55.006464

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this research, the susceptibility of the phase-shifting algorithms to the random intensity error is formulated and estimated. The susceptibility of the random intensity error of conventional windowed phase-shifting algorithms is discussed, and the 7N - 6 phase-shifting algorithm is developed to minimize the random intensity error using the characteristic polynomial theory. Finally, the surface shape of the transparent wedge plate is measured using a wavelength-tuning Fizeau interferometer and the 7N - 6 algorithm. The experimental results indicate that the surface shape measurement accuracy for the transparent plate is 2.5 nm. (C) 2016 Optical Society of America.

引用

页码：6464 / 6470

页数：7