Fabrication of the hybrid ZnO LED structure grown on p-type GaN by metal organic chemical vapor deposition

被引:92
作者
Kim, Dong Chan [1 ]
Han, Won Suk [1 ]
Kong, Bo Hyun [1 ]
Cho, Hyung Koun [1 ]
Hong, Chang Hee [2 ]
机构
[1] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 440746, Gyeonggi Do, South Korea
[2] Chonbuk Natl Univ, Semicond Phys Res Ctr, Dept Semicond Sci & Technol, Chonju 561756, Chonbuk, South Korea
关键词
ZnO; MOCVD; LED; p-GAN;
D O I
10.1016/j.physb.2007.08.194
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
LEDs based on the n-ZnO/p-GaN heterojunction were successfully fabricated with the top/middle/bottorn layer sequence of ZnO/ ZnO nanorods/p-GaN by continuously controlling the growth parameters via metal organic chemical vapor deposition. The ZnO top layer was deposited as a contact layer for the application of nanorods as an active layer, while p-GaN was used as a p-type layer, instead of p-ZnO. The ZnO film grown on ZnO nanorods with high crystalline quality on GaN exhibited the epitaxial properties of a single domain. The light-emitting device fabricated using this hybrid structure demonstrated a forward turn-on voltage of 11 V and a high reverse current, which require further development for device fabrication. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:386 / 390
页数:5
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