e-beam-referenced work-function evaluation in an x-ray photoelectron spectrometer

被引:32
作者
Cohen, H [1 ]
Nogues, C [1 ]
Zon, I [1 ]
Lubomirsky, I [1 ]
机构
[1] Weizmann Inst Sci, IL-76100 Rehovot, Israel
关键词
D O I
10.1063/1.1900296
中图分类号
O59 [应用物理学];
学科分类号
摘要
A method for work-function evaluation is proposed, based on recording the shift of x-ray photoelectron signals from a surface irradiated by low-energy electrons. The method is capable of measuring samples with very low conductivity, poor back contacts, and high dielectric constants. The method is also applicable to magnetic materials and can be particularly effective for studies of multilayer and heterogeneous systems. (C) 2005 American Institute of Physics.
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页数:5
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