FABRICATION OF VERTICALLY ALIGNED SILICON NANOTUBES USING NANOSPHERE BEADS AS THE MASK AND BOSCH PROCESS

被引：0

作者：

He, Yuan ^{[1
]}

Che, Xiangchen ^{[1
]}

Que, Long ^{[1
]}

机构：

[1] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Si nanotubes; Si hollow nanopillars; Bosch process; nanobeads; vertically aligned nanotubes; optical absorption; NANONEEDLE ARRAY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report that silicon nanotubes or hollow nanopillars can be fabricated by a series of standard microfabrication processes, specifically by an ambient temperature Bosch process using the nanosphere beads as the mask. The dimensions of the Si nanotubes can be readily tuned, with a diameter from 10s of nanometers to 100s of nanometers with a high aspect ratio. The as-fabricated Si nanotube surfaces assume super hydrophobicity and have an excellent optical absorption capability, suggesting their potential applications in the fields of life science, biomedical engineering, nanomedicine, solar energy harvesting, and energy storage.

引用

页码：1401 / 1404

页数：4

共 13 条

[1] Adamson A.W., 1999, PHYS CHEM SURFACES
[2] A microfluidic chip for controlled release of drugs from microcapsules
Cheng, Wen-Chuan
He, Yuan
Chang, An-Yi
Que, Long
[J]. BIOMICROFLUIDICS, 2013, 7 (06):
[3] REDUCTION OF LENS REFLECTION BY MOTH EYE PRINCIPLE
CLAPHAM, PB
HUTLEY, MC
[J]. NATURE, 1973, 244 (5414) : 281 - 282
[4] A micromachined carbon nanotube film cantilever-based energy cell
Gong, Zhongcheng
He, Yuan
Tseng, Yi-Hsuan
O'Neal, Chad
Que, Long
[J]. NANOTECHNOLOGY, 2012, 23 (33)
[5] Characterization of the silicon nanopillar-surface filled and grafted with nanomaterials
He, Yuan
Che, Xiangchen
Que, Long
[J]. MATERIALS RESEARCH EXPRESS, 2014, 1 (03):
[6] Carbon nanotubes as drug delivery nanocapsules
Hilder, Tamsyn A.
Hill, James M.
[J]. CURRENT APPLIED PHYSICS, 2008, 8 (3-4) : 258 - 261
[7] Light and thermal energy cell based on carbon nanotube films
Kotipalli, Venu
Gong, Zhongcheng
Pathak, Pushparaj
Zhang, Tianhua
He, Yuan
Yadav, Shashi
Que, Long
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (12)
[8] Real-time monitoring of cell viability using direct electrical measurement with a patch-clamp microchip
Pathak, Pushparaj
Zhao, Hong
Gong, Zhongcheng
Nie, Fang
Zhang, Tianhua
Cui, Kemi
Wang, Zhiyong
Wong, Stephen T. C.
Que, Long
[J]. BIOMEDICAL MICRODEVICES, 2011, 13 (05) : 949 - 953
[9] Hollow Nanoneedle Array and Its Utilization for Repeated Administration of Biomolecules to the Same Cells
Peer, Elad
Artzy-Schnirman, Arbel
Gepstein, Lior
Sivan, Uri
[J]. ACS NANO, 2012, 6 (06) : 4940 - 4946
[10] Biological cell controllable patch-clamp microchip
Penmetsa, Siva
Nagrajan, Krithika
Gong, Zhongcheng
Mills, David
Que, Long
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (26)

← 1 2 →