Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

被引:155
作者
Anders, Andre [1 ]
Ni, Pavel [1 ]
Rauch, Albert [1 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
关键词
PHYSICAL VAPOR-DEPOSITION; HOLLOW-CATHODE DISCHARGE; PLASMA-OSCILLATIONS; INSTABILITY; ELECTRONS; TARGET; ENERGY;
D O I
10.1063/1.3692978
中图分类号
O59 [应用物理学];
学科分类号
摘要
The plasma over a magnetron's erosion "racetrack" is not azimuthally uniform but concentrated in distinct dense ionization zones which move in the E x B direction with about 10% of the electron E x B/B-2 drift velocity. The ionization zones are investigated with a gated camera working in concert with a streak camera for Al, Nb, Cu, and W targets in Ar or Kr background gas. It is found that each ionization zone has a high plasma density edge, which is the origin of a plasma-generating electron jet leaving the target zone. Each region of strong azimuthal plasma density gradient generates an azimuthal electric field, which promotes the escape of magnetized electrons and the formation of electron jets and plasma flares. The phenomena are proposed to be caused by an ionization instability where each dense plasma zone exhibits a high stopping power for drifting high energy electrons, thereby enhancing itself. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3692978]
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页数:13
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