Optical modulator based on a Si0.75Ge0.25/Si/Si0.5Ge0.5 asymmetric superlattice structure

被引:0
作者
Tu, X. [1 ]
Zuo, Y. [1 ]
Chen, S. [1 ]
Zhao, L. [1 ]
Yu, J. [1 ]
Wang, Q. [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
关键词
Fabry-Perot interferometers - Optical waveguides - Plasmas - Superlattices;
D O I
10.1134/s11490-008-4014-2
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An optical modulator is designed and fabricated based on a Si0.75Ge0.25/Si/Si0.5Ge0.5 asymmetrical superlattice structure. The device comprises a p-i-n diode made on the asymmetrical superlattice integrated with a 920-mu m-long Fabry-Perot (F-P) cavity. Parameters of the rib waveguide are designed to satisfy only the fundamental-TE mode transmission. Here, 65 and 40-pm red shifts of the peak resonant were measured under the applied bias of 2.5 and -32.0 V, respectively. The analysis shows that, besides the thermal-optical and plasma dispersion effects, the Pockels effect also contributes to such a peak shift. The corresponding calculated effective Pockels coefficient is about 0.158 pm/V.
引用
收藏
页码:438 / 441
页数:4
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