Low power integrated fluxgate sensor with a spiral magnetic core

被引:2
作者
Lei, Chong [1 ]
Chen, Lei [1 ]
Lei, Jian [1 ]
Yang, Xiaohu [1 ]
Zhou, Yong [1 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat, Inst Micro & Nano Sci & Technol,Minist Educ, Shanghai 200240, Peoples R China
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2011年 / 17卷 / 12期
基金
中国国家自然科学基金;
关键词
NOISE;
D O I
10.1007/s00542-011-1365-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Facing the new integrated applications, coordination between three parameters of the micro fluxgate sensor, namely, sensitivity, power consumption and operation range, is the key to make the applications come true. This paper reports a new low power micro integrated fluxgate sensor with low cost solution. A spiral electroplating permalloy magnetic core is introduced to reduce excitation current. Due to the design of little coils resistance and thick magnetic core, the fluxgate sensor exhibits a power consumption of 7.35 mW, a sensitivity of 117 V/T and a linear range of -200 to 200 mu T. Compared with the constant-width magnetic core and the multi rectangular ring magnetic cores, experiment results show that the spiral magnetic core benefits both smaller excitation current and higher sensitivity. The newly developed fluxgate sensor maintains high sensitivity and wide linear range with low power consumption.
引用
收藏
页码:1697 / 1702
页数:6
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