共 50 条
[22]
Sputtering and smoothing of metal surface with energetic gas cluster beams
[J].
Mater Chem Phys,
1-3 (234-237)
[24]
SIZE EFFECTS IN METAL CLUSTER-ION CHEMISTRY
[J].
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES,
1992, 121 (1-2)
:1-47
[26]
Nanofabrication technology by gas cluster ion beams
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (06)
:3951-3954
[27]
Surface processing by gas cluster ion beams
[J].
ION IMPLANTATION TECHNOLOGY - 96,
1997,
:808-811
[28]
Nanofabrication technology by gas cluster ion beams
[J].
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena,
1996, 14 (06)
[29]
Surface processing by gas cluster ion beams
[J].
ADVANCES IN COATINGS TECHNOLOGIES FOR SURFACE ENGINEERING,
1996,
:71-77