A Compact and Highly Efficient Silicon-Based Asymmetric Mach-Zehnder Modulator with Broadband Spectral Operation

被引:8
作者
Zhou Liang [1 ]
Li Zhi-Yong [1 ]
Xiao Xi [1 ]
Xu Hai-Hua [1 ]
Fan Zhong-Chao [2 ]
Han Wei-Hua [2 ]
Yu Yu-De [1 ]
Yu Jin-Zhong [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1088/0256-307X/28/7/074202
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
An asymmetric Mach-Zehnder electro-optic modulator is demonstrated by using a silicon-based p-i-n diode embedded in compact 200 mu m long phase shifters. The measured figure of merit V-pi L = 0.23 V.mm shows highly efficient modulation by the device, and an open eye-diagram at 3.2 Gbit/s confirmed its fast electro-optic response. Integrated with the grating coupler, the device exhibits a broad operational wavelength range of 70 nm with a uniform 18 dB extinction ratio covering the C-band and part L-band of optical communication.
引用
收藏
页数:4
相关论文
共 12 条
  • [1] BIENSTMAN P, 2004, CAMFR1 2, P8301
  • [2] Ultra-compact, low RF power, 10 gb/s silicon Mach-Zehnder modulator
    Green, William M. J.
    Rooks, Michael J.
    Sekaric, Lidija
    Vlasov, Yurii A.
    [J]. OPTICS EXPRESS, 2007, 15 (25): : 17106 - 17113
  • [3] High-speed optical modulation based on carrier depletion in a silicon waveguide
    Liu, Ansheng
    Liao, Ling
    Rubin, Doron
    Nguyen, Hat
    Ciftcioglu, Berkehan
    Chetrit, Yoel
    Izhaky, Nahum
    Paniccia, Mario
    [J]. OPTICS EXPRESS, 2007, 15 (02) : 660 - 668
  • [4] A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor
    Liu, AS
    Jones, R
    Liao, L
    Samara-Rubio, D
    Rubin, D
    Cohen, O
    Nicolaescu, R
    Paniccia, M
    [J]. NATURE, 2004, 427 (6975) : 615 - 618
  • [5] OPTICAL MULTIMODE INTERFERENCE DEVICES BASED ON SELF-IMAGING - PRINCIPLES AND APPLICATIONS
    SOLDANO, LB
    PENNINGS, ECM
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1995, 13 (04) : 615 - 627
  • [6] ELECTROOPTICAL EFFECTS IN SILICON
    SOREF, RA
    BENNETT, BR
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (01) : 123 - 129
  • [7] The past, present, and future of silicon photonics
    Soref, Richard
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (06) : 1678 - 1687
  • [8] Grating couplers for coupling between optical fibers and nanophotonic waveguides
    Taillaert, Dirk
    Van Laere, Frederik
    Ayre, Melanie
    Bogaerts, Wim
    Van Thourhout, Dries
    Bienstman, Peter
    Baets, Roel
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (8A): : 6071 - 6077
  • [9] Sub-nanosecond optical switch based on silicon racetrack resonator
    Xu Hai-Hua
    Huang Qing-Zhong
    Li Yun-Tao
    Yu Yu-De
    Yu Jin-Zhong
    [J]. CHINESE PHYSICS B, 2010, 19 (08)
  • [10] Xu XJ, 2009, CHINESE PHYS B, V18, P3900, DOI 10.1088/1674-1056/18/9/047