0.25 deg/h Closed-Loop Bulk Acoustic Wave Gyroscope

被引：12

作者：

Serrano, Diego Emilio ^{[1
]}

Rahafrooz, Amir ^{[1
]}

Lipka, Ronald ^{[1
]}

Younkin, Duane ^{[1
]}

Nunan, Kieran ^{[1
]}

English, John ^{[1
]}

Chen, Chihchuan ^{[1
]}

Hennessy, Ryan ^{[1
]}

Jeong, Yaesuk ^{[1
]}

Ivanov, Eugene ^{[1
]}

Sullivan, Dan ^{[1
]}

Jafri, Ijaz ^{[1
]}

机构：

[1] Panasonic Device Solut Lab Massachusetts, Marlborough, MA 01752 USA

来源：

2022 9TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (IEEE INERTIAL 2022) | 2022年

关键词：

MEMS; Gyroscope; Bulk-Acoustic Wave; Negative Charge Pump;

D O I：

10.1109/INERTIAL53425.2022.9787726

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the design and characterization of a low-noise, wide-bandwidth, mode-matched bulk-acoustic wave (BAW) gyroscope operating in a rotation-rate closed-loop configuration. The high Q (350,000), second-elliptical degenerate modes (4.84 MHz) of a vacuum-packaged (100) single-crystal silicon disk are interfaced with integrated electronics in a force-to-rebalance (FTR) architecture, achieving an angle white noise (AWN) of 0.021 ''/root Hz, an angle random walk (ARW) of 0.017 degrees/root vh, and an Allan deviation of 0.25 degrees/h in the bias instability (BI) region. By utilizing a relatively low disk polarization voltage of -5 V, the contribution of drive-loop flicker noise, induced by parallel-plate capacitive non-linearity, is significantly reduced. The use of a negative bias voltage, which is internally generated by a new charge pump architecture within the integrated circuit, guarantees that wide tuning and quadrature compensation ranges can still be attained.

引用

页数：4

共 12 条

[1] High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology [J].

Ayazi, F ;

Najafi, K .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (03) :288-294

[2] A mode-matched force-rebalance control for a MEMS vibratory gyroscope [J].

Hu, Zhongxu ;

Gallacher, Barry .

SENSORS AND ACTUATORS A-PHYSICAL, 2018, 273 :1-11

[3] Phase noise in capacitively coupled micromechanical oscillators [J].

Kaajakari, V ;

Koskinen, JK ;

Mattila, T .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) :2322-2331

[4] Temperature dependence of quality factor in MEMS resonators [J].

Kim, Bongsang ;

Hopcroft, Matthew A. ;

Candler, Rob N. ;

Jha, Chandra Mohan ;

Agarwal, Manu ;

Melamud, Renata ;

Chandorkar, Saurabh A. ;

Yama, Gary ;

Kenny, Thomas W. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (03) :755-766

[5] Spectral Analysis of Vibratory Gyro Noise [J].

Kim, Dennis ;

M'Closkey, Robert Thomas .

IEEE SENSORS JOURNAL, 2013, 13 (11) :4361-4374

[6] A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes [J].

Li, Chong ;

Wen, Haoran ;

Chen, Hua ;

Ayazi, Farrokh .

SENSORS AND ACTUATORS A-PHYSICAL, 2020, 313

[7]

Mirjalili R, 2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), P15, DOI 10.1109/TRANSDUCERS.2015.7180849

[8] Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope [J].

Parajuli, Madan ;

Sobreviela, Guillermo ;

Pandit, Milind ;

Zhang, Hemin ;

Seshia, Ashwin A. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021, 30 (06) :836-842

[9] Gyroscope Technology and Applications: A Review in the Industrial Perspective [J].

Passaro, Vittorio M. N. ;

Cuccovillo, Antonello ;

Vaiani, Lorenzo ;

De Carlo, Martino ;

Campanella, Carlo Edoardo .

SENSORS, 2017, 17 (10)

[10]

Serrano D.E., 2022, U. S. Patent Application, Patent No. [63/267,241, 63267241]

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